Published research · Custom development · 8-inch production route

压电MEMS麦克风与扬声器

Custom piezoelectric MEMS microphones, microphone arrays and micro-speakers for aeroacoustics, sensing, consumer systems, wearables and industrial applications.

宽频带、小型化的压电MEMS声学器件。

10–100 kHz configurable acoustic range

Single and dual-frequency structures

High dynamic range and low-noise architectures

Wafer-level array manufacturing

交付内容

Single microphone and speaker chips
Dual-frequency and multi-band structures
Microphone arrays and acoustic sensing chips
Wafer-level devices and diced components
Engineering samples and pilot lots
Custom test structures and characterisation options

可配置参数

Frequency response
Sensitivity and dynamic-range targets
Device and cantilever geometry
Array size and pitch
Electrical interface
Packaging and environmental constraints

应用领域

Aeroacoustic and wind-tunnel testing
Industrial noise and condition monitoring
Wearable and compact acoustic systems
Ultrasonic transmission and reception
Research instrumentation
Custom OEM modules

制造路线

工程样品

试产

量产

真实制造与表征

精选25FAB及项目相关的真实制造与表征图片，以更适合客户理解和判断的方式呈现。

Piezoelectric acoustic wafer, flex array, packaged device and SEM structures

代表性文章

与该平台相关的代表性文章。

Dual frequency Aluminum scandium nitride piezoelectric microphones with wide bandwidth, large dynamic range and high sensitivity for wind tunnel testing

Transducers 2023 Oral presentation

作者: Yanfen Zhai, Lixiang Wu
期刊 / 会议: Transducers
年份: 2023
类型: Oral presentation

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压电MEMS麦克风与扬声器

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