Published research · Custom development · 8-inch production route

压电MEMS麦克风与扬声器

Custom piezoelectric MEMS microphones, microphone arrays and micro-speakers for aeroacoustics, sensing, consumer systems, wearables and industrial applications.

宽频带、小型化的压电MEMS声学器件。

10–100 kHz configurable acoustic range
Single and dual-frequency structures
High dynamic range and low-noise architectures
Wafer-level array manufacturing
压电MEMS麦克风与扬声器

交付内容

  • Single microphone and speaker chips
  • Dual-frequency and multi-band structures
  • Microphone arrays and acoustic sensing chips
  • Wafer-level devices and diced components
  • Engineering samples and pilot lots
  • Custom test structures and characterisation options

可配置参数

  • Frequency response
  • Sensitivity and dynamic-range targets
  • Device and cantilever geometry
  • Array size and pitch
  • Electrical interface
  • Packaging and environmental constraints

应用领域

  • Aeroacoustic and wind-tunnel testing
  • Industrial noise and condition monitoring
  • Wearable and compact acoustic systems
  • Ultrasonic transmission and reception
  • Research instrumentation
  • Custom OEM modules

制造路线

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工程样品

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试产

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量产

真实制造与表征

精选25FAB及项目相关的真实制造与表征图片,以更适合客户理解和判断的方式呈现。

代表性文章

与该平台相关的代表性文章。

Dual frequency Aluminum scandium nitride piezoelectric microphones with wide bandwidth, large dynamic range and high sensitivity for wind tunnel testing
Transducers 2023 Oral presentation
作者
Yanfen Zhai, Lixiang Wu
期刊 / 会议
Transducers
年份
2023
类型
Oral presentation

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压电MEMS麦克风与扬声器