Engineering samples · Pilot production · 8-inch scale-up

PMUT定制平台

Custom PMUT chips and wafer-level arrays for ultrasound research, OEM integration, wearable devices, miniaturised systems and industrial sensing.

面向定制超声系统的高性能PMUT芯片与高密度阵列。

1–50 MHz configurable range
Single elements to 1024 elements and beyond
Diced chips, wafer-level devices and full wafers
8-inch production route
PMUT定制平台

交付内容

  • Single-element PMUT chips
  • Linear, phased and two-dimensional arrays
  • High-density arrays up to 1024 elements and beyond
  • Wafer-level test structures and process-control monitors
  • Diced chips, engineering wafers or full-wafer delivery
  • Custom project-specific manufacturing

可配置参数

  • Target frequency and bandwidth
  • Element number, pitch and aperture
  • Array geometry and chip dimensions
  • Electrical routing and interface
  • Wafer and delivery format
  • Prototype and annual production quantity

应用领域

  • Medical and wearable ultrasound research
  • Photoacoustic imaging
  • Miniaturised and catheter-based systems
  • Industrial inspection
  • Robotics and sensing
  • Academic and OEM development

制造路线

1

工程样品

2

试产

3

量产

真实制造与表征

精选25FAB及项目相关的真实制造与表征图片,以更适合客户理解和判断的方式呈现。

代表性文章

与该平台相关的代表性文章。

Dual-frequency piezoelectric micromachined ultrasonic transducers for fundamental and harmonic imaging
IEEE MEMS 2023 Conference paper
作者
Yanfen Zhai, Lixiang Wu
期刊 / 会议
IEEE MEMS
年份
2023
类型
Conference paper
On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses
SPIE 2023 Oral presentation
作者
Yanfen Zhai, Lixiang Wu
期刊 / 会议
SPIE
年份
2023
类型
Oral presentation

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PMUT定制平台