What We Supply
- Single-axis and two-axis mirror chips
- Custom mirror apertures and suspension designs
- Wafer-level devices and diced chips
- Electrical test structures
- Engineering samples and dedicated wafer runs
- Project-specific scale-up
Engineering samples · Joint development · 200 mm scale-up
Piezoelectric MEMS Micromirrors
Custom thin-film piezoelectric MEMS micromirrors for AR/XR, LiDAR, projection, optical sensing and precision beam steering.
Fast, precise beam steering and optical scanning with low-voltage piezoelectric actuation.
Low-voltage actuation
Wide optical scan-angle designs
Low-power device architectures
200 mm manufacturing route
Configurable Parameters
- Mirror aperture
- Mechanical scan angle
- Resonant or quasi-static operation
- Drive-voltage target
- Optical flatness requirements
- Packaging and system interface
Application Areas
- AR/XR displays
- Solid-state LiDAR
- Pico-projection
- Optical switching
- Spectroscopy
- Industrial optical systems
Manufacturing Route
1
Engineering Samples
2
Pilot Production
3
Volume Production
Real Fabrication & Characterisation
Selected 25FAB and project fabrication images presented in a more commercial, customer-ready format.
Contact
Piezoelectric MEMS Micromirrors