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Piezoelectric MOEMS · beam steering · optical scanning

Piezoelectric MEMS Micromirrors

Custom resonant micromirror development for fast, precise beam steering and optical scanning with low-voltage piezoelectric actuation. 25FAB supports project-specific device engineering, engineering samples and a structured route toward repeatable wafer-level manufacturing.

Low-voltage piezo actuationDesigned for compact optical systems where power and size matter.
1D / 2D resonant architecturesDevice concepts can be aligned with scan function and optical requirements.
Mechanical optimisationMirror geometry, reinforcement and actuator configuration can be co-engineered.
Engineering to scale-upA commercial route from early devices toward repeatable wafer-level programs.
Piezoelectric MEMS micromirror devices and platform

Micromirror architecture. Focused commercial story.

The hero visual is based on the platform's circular mirror, piezoelectric actuator and wire-bonded die architecture. Technical development evidence and selected publications are presented below.

Capabilities

Built around the device requirements that matter

A concise commercial presentation for optical OEMs, system developers and advanced R&D teams.

01

Resonant beam steering

Custom micromirror architectures for fast optical scanning and compact beam-control functions.

02

Mirror mechanics

Mirror aperture, structural geometry and backside reinforcement concepts can be tuned to the project.

03

Piezoelectric actuation

Low-voltage actuation and actuator-layout engineering for power-sensitive optical subsystems.

04

Scale-up planning

Engineering samples, process iteration and a clear manufacturing path rather than a one-off research device.

Applications

High-value optical systems

Positioned for customers who need a custom MEMS optical device rather than catalogue scanning hardware.

AR / XR opticsCompact scanning and beam-control concepts for wearable and near-eye optical systems.
LiDARFast beam steering for next-generation optical ranging and perception architectures.
Pico projectionMiniaturised scanning engines for compact projection and illumination systems.
Advanced instrumentationCustom optical scanning devices for scientific and industrial systems with non-standard requirements.
Research evidence

Three selected micromirror / MOEMS publications

Prior peer-reviewed work is shown as technical heritage. It supports the engineering background without implying ownership of third-party facilities or equipment.

Novel Piezoelectric MOEMS Platform
2022Research output — Poster — peer-reviewSilicon Austria Labs research output
Authors
Anton Lagosh; Yanfen Zhai; Sarah Risquez; Annalisa De Pastina; Nikolai Andrianov; Lukas Vojkuvka; Jaka Pribošek; Adrien Piot; Mohssen Moridi
Output
Research output — Poster — peer-review
Year
2022
Publisher / context
Silicon Austria Labs research output
Prior R&D work demonstrating a piezoelectric MOEMS technology platform and micromirror development heritage.
Arbitrary Shaped Backside Reinforcement for Two Dimensional Resonant Micromirrors
20232023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)IEEE
Authors
Takashi Sasaki; Adrien Piot; Anton Lagosh; Clement Fleury; Markus Bainschab; Yanfen Zhai; Marcus Baumgart; Sara Guerreiro; Dominik Holzmann; Aleš Travnik; Mohssen Moridi
Output
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Year
2023
Publisher / context
IEEE
Peer-reviewed conference paper on backside reinforcement concepts for two-dimensional resonant micromirrors.
Open publication
Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation Mechanism
20232023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)IEEE
Authors
Takashi Sasaki; Adrien Piot; Jaka Pribošek; Anton Lagosh; Clement Fleury; Markus Bainschab; Yanfen Zhai; Marcus Baumgart; Sara Guerreiro; Dominik Holzmann; Aleš Travnik; Mohssen Moridi
Output
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
Year
2023
Publisher / context
IEEE
Peer-reviewed conference paper addressing dynamic mirror deformation compensation under piezoelectric actuation.
Open publication
Project route

From optical requirement to engineering device

The customer only needs to start with the target optical function. 25FAB can then structure the device-development discussion.

1RequirementsWavelength, scan function, aperture, speed, voltage and package constraints.
2ArchitectureDefine mirror geometry, resonant mode, actuator concept and interfaces.
3EngineeringTranslate the concept into device and process design.
4SamplesBuild and review engineering devices against project-relevant targets.
5Scale-upPlan recurring wafer-level supply if the device moves toward a product.

Have a beam-steering requirement?

Email the target wavelength, scan range, aperture, frequency, voltage constraints and expected project volume. No website form or account is required.

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Same-day paid design package

A design package can be delivered on the day payment is confirmed, once the technical brief is complete and actionable. Fabrication, qualification and custom process development follow separate schedules.

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