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Custom co-development · Dedicated integration · 8-inch-compatible route

Tích hợp PIC + Piezo / BTO

Integrated photonic circuits combined with PZT, AlN, AlScN, BTO-on-Si and related functional materials for tunable photonics, modulation, beam control and heterogeneous integration.

PIC integration with PZT, AlN, AlScN, BTO-on-Si and other electro-optic / piezoelectric functional films.

PZT / AlN / AlScN integration
BTO-on-Si electro-optics
Si₃N₄ / SOI photonics
Wafer-scale heterogeneous integration
Tích hợp PIC + Piezo / BTO

What We Supply

  • PIC wafers with integrated piezoelectric and BTO devices
  • Tunable resonators, phase shifters and modulators
  • Custom bonding and integration flows
  • Electrical and optical test structures
  • Diced chips and full wafers
  • Engineering samples to pilot production

Configurable Parameters

  • Photonic platform
  • Piezoelectric or BTO device function
  • Tuning or modulation target
  • Drive and interface requirements
  • Integration sequence
  • Wafer and volume targets

Application Areas

  • Tunable photonics
  • Electro-optic modulation
  • Quantum systems
  • Optical communications
  • LiDAR and phased arrays
  • Precision sensing

Manufacturing Route

1

Engineering Samples

2

Pilot Production

3

Volume Production

Real Fabrication & Characterisation

Selected 25FAB and project fabrication images presented in a more commercial, customer-ready format.

Integrated wafer platform
Integrated wafer platform
Piezoelectric wafer-level devices
Piezoelectric wafer-level devices
Heterogeneous integration example
Heterogeneous integration example

Selected Publications

Representative publications related to this platform.

On-chip photoacoustic transducer based on monolithic integration of piezoelectric micromachined ultrasonic transducers and metasurface lenses
SPIE 2023 Oral presentation
Authors
Yanfen Zhai, Lixiang Wu
Journal / Conference
SPIE
Year
2023
Type
Oral presentation
On-chip integrated lateral and vertical tunable metasurfaces for 3D imaging
MNE-ES 2022 Oral presentation
Authors
Yanfen Zhai, Takashi Sasaki, Mohssen Moridi, Ronghui Lin, Zahrah Alnakhli, Lixiang Wu, Atif Shamim, Xiaohang Li, Mohammad Younis, Kazuhiro Hane
Journal / Conference
MNE-ES
Year
2022
Type
Oral presentation

Liên hệ

Tích hợp PIC + Piezo / BTO

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