{"id":746,"date":"2025-12-03T19:30:08","date_gmt":"2025-12-03T19:30:08","guid":{"rendered":"https:\/\/25fab.ch\/?page_id=746"},"modified":"2026-01-25T21:47:31","modified_gmt":"2026-01-25T21:47:31","slug":"fabrication-cn","status":"publish","type":"page","link":"https:\/\/25fab.ch\/index.php\/fabrication-cn\/","title":{"rendered":"fabrication-cn"},"content":{"rendered":"\n

\u670d\u52a1 -> \u5fae\u7eb3\u5236\u9020<\/p>\n\n\n\n

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\"\"<\/a><\/figure>\n\n\n\n
\"\"<\/a><\/figure>\n\n\n\n
\"\"<\/a><\/figure>\n<\/div>\n\n\n\n

\u5fae\u7eb3\u52a0\u5de5\u670d\u52a1<\/p>\n\n\n\n

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\u5149\u523b<\/strong><\/h2>\n\n\n\n

\u7cbe\u5bc6\u5149\u523b\u4ee3\u5de5\u5382\u2014\u201410nm\u81f3100nm\uff0c4\u82f1\u5bf8\u81f38\u82f1\u5bf8\u6676\u5706<\/strong><\/p>\n\n\n\n

25FAB \u63d0\u4f9b\u4e00\u5957\u5168\u9762\u7684\u5185\u90e8\u5149\u523b\u5957\u4ef6\uff0c\u53ef\u65e0\u7f1d\u96c6\u6210\uff1a<\/p>\n\n\n\n

    \n
  • 200kV\u7535\u5b50\u675f\u5149\u523b\uff08\u5206\u8fa8\u7387\u226410nm\uff0c\u975e\u5e38\u9002\u5408\u8d85\u8868\u9762\u548c\u91cf\u5b50\u5149\u5b50\u5b66\uff09<\/li>\n\n\n\n
  • 193nm DUV \u6d78\u6ca1\u5f0f\u6b65\u8fdb\u5149\u523b\u673a\uff08100nm \u7ed3\u6784\uff0c\u9002\u7528\u4e8e 4 \u82f1\u5bf8\u81f3 8 \u82f1\u5bf8 TFLN\u3001InP \u548c MEMS-PIC \u7684\u6279\u91cf\u751f\u4ea7\uff09<\/li>\n\n\n\n
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  • \u53cc\u9762\u63a5\u89e6\/\u6295\u5f71\u5bf9\u51c6\u5668\uff08\u22650.8\u00b5m\uff0c\u4e9a\u5fae\u7c73\u7ea7\u524d\u540e\u5bf9\u51c6\uff0c\u9002\u7528\u4e8eMEMS\u548c\u952e\u5408\uff09<\/li>\n<\/ul>\n\n\n\n

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    \n

    \u4e3b\u8981\u529f\u80fd\uff1a<\/strong><\/p>\n\n\n\n

    25FAB \u63d0\u4f9b\u5168\u7403\u6700\u5e7f\u6cdb\u7684\u5149\u523b\u4ea7\u54c1\u7ec4\u5408\u2014\u2014\u4ece \u226410nm EBL \u5230 100nm \u5168\u5c3a\u5bf8 8 \u82f1\u5bf8 DUV \u6b65\u8fdb\u5149\u523b\u673a\u2014\u2014\u80fd\u591f\u5728\u5355\u4e00\u4ee3\u5de5\u5382\u5185\u5b9e\u73b0\u4ece\u6700\u9ad8\u5206\u8fa8\u7387\u7814\u7a76\u5230\u5927\u6279\u91cf\u6279\u91cf\u751f\u4ea7\u7684\u65e0\u7f1d\u8fc7\u6e21\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

    \n
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    \u8680\u523b<\/strong><\/h2>\n\n\n\n

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      \n
    • \u7528\u4e8e\u94cc\u9178\u9502\u3001\u6c27\u5316\u949b\u3001\u538b\u7535\u9676\u74f7\u3001\u6c2e\u5316\u94dd\u7684\u9ad8\u54c1\u8d28\u3001\u4f4e\u635f\u4f24ICP\/RIE\u5de5\u827a<\/li>\n\n\n\n
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    • \u975e\u7c98\u9644\u6027\u6c14\u76f8HF\/XeF\u2082\u91ca\u653e<\/strong><\/li>\n<\/ul>\n\n\n\n

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      \n

      \u4e3b\u8981\u529f\u80fd\uff1a<\/strong><\/p>\n\n\n\n

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      \n
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      \u4e2d\u7b49\u7535\u6d41\u79bb\u5b50\u6ce8\u5165\u670d\u52a1<\/strong><\/strong><\/h2>\n\n\n\n

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      \n

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      \n
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      \u7cbe\u5bc6\u56de\u78e8\u4e0e\u5e94\u529b\u91ca\u653e\u670d\u52a1<\/strong><\/strong><\/strong><\/strong><\/h2>\n\n\n\n

      4\u20138 \u82f1\u5bf8\u6676\u5706<\/p>\n\n\n\n

      \u521d\u59cb\u539a\u5ea6\uff1a\u2264\u202f2200\u202f\u00b5m<\/strong> \u6700\u7ec8TTV\uff1a<\u202f1\u202f\u00b5m\uff08200\u202fmm\u6676\u5706\uff09<\/strong> \u8868\u9762\u5904\u7406<\/strong>:<\/p>\n\n\n\n

        \n
      • \u7845\u3001\u94cc\u9178\u9502\u3001\u94bd\u9178\u9502\u3001\u4e8c\u6c27\u5316\u7845\u3001\u9487\u94dd\u77f3\u69b4\u77f3\uff1a\u8868\u9762\u7c97\u7cd9\u5ea6 Ra <\u202f10\u202fnm<\/li>\n\n\n\n
      • 4H\/6H\u2011SiC\uff08\u5355\u6676 & \u591a\u6676\uff09\uff1a\u8868\u9762\u7c97\u7cd9\u5ea6 Ra <\u202f3\u202fnm<\/strong><\/li>\n<\/ul>\n\n\n\n

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        \n

        \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/p>\n\n\n\n

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        \n
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        \u5316\u5b66\u673a\u68b0\u629b\u5149 (CMP)<\/strong><\/strong><\/h2>\n\n\n\n

        4\u20138 \u82f1\u5bf8\u6676\u5706<\/p>\n\n\n\n

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        \n

        \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong>

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        \n
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        \u9ad8\u6e29 LPCVD \u7089\u8bbe\u5907<\/strong><\/strong><\/h2>\n\n\n\n

        4\u20138 \u82f1\u5bf8\u6676\u5706<\/strong>

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        \n

        \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/p>\n\n\n\n

        25FAB \u63d0\u4f9b\u5e94\u529b\u53ef\u63a7\u7684 LPCVD-Si\u2083N\u2084\u3001HTO\u3001LTO\u3001Poly-Si \u4ee5\u53ca\u9ad8\u6e29\u9000\u706b\u5de5\u827a\uff0c\u5728 4\u20138 \u82f1\u5bf8\u6676\u5706\u4e0a\u5b9e\u73b0\u539f\u5b50\u7ea7\u5747\u5300\u6027 \u2014\u2014 \u9002\u7528\u4e8e\u5149\u5b50\u5668\u4ef6\u3001MEMS \u4e0e\u538b\u7535\u5e73\u53f0\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

        \n
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        4″\u20138″ \u5168\u65b9\u4f4d\u6676\u5706\u5207\u5272\u5e73\u53f0<\/strong><\/p>\n\n\n\n

          \n
        • \u57fa\u4e8e\u7b49\u79bb\u5b50\u4f53\u7684\u9690\u5f62\u5207\u5272\uff1a\u65e0\u788e\u7247\u3001\u65e0\u5207\u7f1d\uff0c\u5b9e\u73b0\u8d85\u8584\u82af\u7247\u7684\u5206\u79bb\uff0c\u9002\u7528\u4e8e LiNbO\u2083\u3001LTO\u3001SOI\u3001GaN\u3001SiC \u53ca\u8106\u5f31\u7684\u8584\u819c\u5806\u53e0<\/strong><\/li>\n\n\n\n
        • \u4e0d\u89c4\u5219 \/ \u5b9a\u5236\u5316\u5f62\u72b6\u5207\u5272\uff1a\u81ea\u7531\u5f62\u72b6\u3001\u66f2\u9762\u3001\u516d\u8fb9\u5f62\u3001\u591a\u534a\u5f84\u6216\u4efb\u4f55\u590d\u6742\u51e0\u4f55\u7ed3\u6784\uff0c\u5177\u5907\u5fae\u7c73\u7ea7\u7cbe\u5ea6<\/strong><\/li>\n\n\n\n
        • \u9ad8\u901f\u5200\u7247\u5207\u5272\u3001DBG \u4ee5\u53ca\u591a\u9879\u76ee\u9762\u677f\u5316\u540c\u6837\u53ef\u7528<\/strong><\/li>\n\n\n\n
        • \u5728 50\u202f\u00b5m \u539a\u7684 LiNbO\u2083 \u4e0a\uff0c\u82af\u7247\u5f3a\u5ea6\u5e38\u89c4\u53ef\u8fbe >\u202f750\u202fMPa<\/strong><\/li>\n<\/ul>\n\n\n\n

          \u4ece\u6807\u51c6\u77e9\u5f62\u5230\u5b8c\u5168\u5b9a\u5236\u5316\u8f6e\u5ed3\uff0c\u5373\u4f7f\u662f\u5728\u6700\u654f\u611f\u7684\u5149\u5b50\/\u538b\u7535\u6676\u5706\u4e0a \u2014\u2014 25FAB \u4e5f\u80fd\u5b8c\u6210\u5176\u4ed6\u4eba\u65e0\u6cd5\u5b8c\u6210\u7684\u5207\u5272\u3002<\/p>\n<\/div>\n\n\n\n

          \n

          \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/p>\n\n\n\n

          25FAB \u63d0\u4f9b\u65e0\u788e\u7247\u7684\u9690\u5f62\u5207\u5272\u4ee5\u53ca\u5b8c\u5168\u5b9a\u5236\u5316\u7684\u82af\u7247\u5206\u79bb\uff08\u4efb\u610f\u51e0\u4f55\u5f62\u72b6\uff09\uff0c\u9002\u7528\u4e8e 4\u20138 \u82f1\u5bf8\u7684\u8106\u5f31\u5316\u5408\u7269\u3001\u538b\u7535\u4e0e\u5149\u5b50\u6676\u5706\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

          \n
          \n

          \u5ba4\u6e29\u6676\u5706\u952e\u5408<\/strong><\/h2>\n\n\n\n

          \u6676\u5706\u5c3a\u5bf8\uff1a4\u30016\u30018 \u82f1\u5bf8<\/strong> \u6676\u5706\u539a\u5ea6\uff1a\uff1c\u202f1000\u202f\u00b5m<\/strong> \u5bf9\u51c6\u7cbe\u5ea6\uff1aX\u3001Y \u2264\u202f70\u202f\u00b5m\uff1b\u03b8 \u2264\u202f0.2\u00b0<\/strong> \u952e\u5408\u80fd\u91cf\uff1a1.0\u20132.0\u202fJ\/m\u00b2<\/strong> \u53ef\u52a0\u5de5\u6676\u5706\u7c7b\u578b\uff1a4H-SiC\u3001\u591a\u6676 SiC\u3001Si\u3001SiO\u2082\u3001LT\u3001LN\u3001\u77f3\u82f1\u3001\u73bb\u7483\u3001\u84dd\u5b9d\u77f3\u3001InP\u3001YAG\u3001GaAs \u7b49<\/strong><\/p>\n<\/div>\n\n\n\n

          \n

          \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/p>\n\n\n\n

          \u540c\u8d28\u4e0e\u5f02\u8d28\u6750\u6599\u952e\u5408<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

          \n
          \n

          \u4eb2\u6c34\u6027\u4e0e\u6df7\u5408\u578b\u6676\u5706\u952e\u5408<\/strong><\/strong><\/h2>\n\n\n\n

          \u6676\u5706\u5c3a\u5bf8\uff1a6\u30018 \u82f1\u5bf8<\/strong> \u6676\u5706\u539a\u5ea6\uff1a<\/strong><\/p>\n\n\n\n

            \n
          • 6 \u82f1\u5bf8 \u2264\u202f700\u202f\u00b5m<\/strong> <\/li>\n\n\n\n
          • 8 \u82f1\u5bf8 \u2264\u202f800\u202f\u00b5m<\/strong><\/li>\n<\/ul>\n\n\n\n

            \u952e\u5408\u80fd\u91cf\uff1a1.4 \u2013 2.0\u202fJ\/m\u00b2<\/strong> \u53ef\u52a0\u5de5\u6676\u5706\u7c7b\u578b\uff1aSi\u3001SiO\u2082\u3001LT\u3001LN\u3001InP\u3001GaAs\u3001SiN \u7b49<\/strong><\/p>\n<\/div>\n\n\n\n

            \n

            \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

            \u540c\u8d28\u4e0e\u5f02\u8d28\u6750\u6599\u952e\u5408<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

            \n
            \n

            \u70ed\u538b\u7f29\u952e\u5408\u4e0e\u9633\u6781\u952e\u5408\u5de5\u827a<\/strong><\/strong><\/strong><\/h2>\n\n\n\n

            \u6676\u5706\u5c3a\u5bf8\uff1a4\u30016\u30018\u300112 \u82f1\u5bf8<\/strong> \u6676\u5706\u539a\u5ea6\uff1a0.3 \u2013 3\u202fmm<\/strong> \u5bf9\u51c6\u7cbe\u5ea6\uff1a\u2264\u202f0.5\u202fmm\uff08\u673a\u68b0\u5bf9\u51c6\uff09\uff0c\u2264\u202f2\u202f\u00b5m\uff08\u5149\u5b66\u5bf9\u51c6\uff09<\/strong> \u952e\u5408\u80fd\u91cf\uff1a\u2265\u202f2.0\u202fJ\/m\u00b2<\/strong> \u53ef\u52a0\u5de5\u6750\u6599\u7c7b\u578b\uff1aSi\u3001Au\u3001Ag\u3001Cu\u3001AuSn\u3001AlGe\u3001SnAg\u3001AuGe\u3001AuIn\u3001AuSi \u7b49<\/strong><\/p>\n<\/div>\n\n\n\n

            \n

            \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

            \u91d1\u5c5e\u6750\u6599\u7684\u70ed\u538b\u7f29\u952e\u5408\u3001\u5171\u6676\u6750\u6599\u952e\u5408\u4e0e\u9633\u6781\u952e\u5408<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

            \n
            \n

            \u79bb\u5b50\u675f\u629b\u5149\u4e0e\u523b\u8680\u8bbe\u5907<\/strong><\/strong><\/h2>\n\n\n\n

            \u6676\u5706\u5c3a\u5bf8\uff1a4\u30016\u30018 \u82f1\u5bf8<\/strong> \u6676\u5706\u539a\u5ea6\uff1a400 \u2013 1000\u202f\u00b5m<\/strong> \u8bbe\u5907\u80fd\u529b\uff1a\u539a\u5ea6\u5747\u65b9\u5dee\uff08THK-Sigma\uff09\u63d0\u5347\u8d85\u8fc7 3 \u500d<\/strong><\/p>\n\n\n\n

              \n
            • SiO\u2082 \u539a\u5ea6\u8303\u56f4\uff1a\uff1c\u202f10\u202f\u00c5<\/strong> <\/li>\n\n\n\n
            • LTOI\/LNOI \u8303\u56f4\uff1a\uff1c\u202f100\u202f\u00c5<\/strong> <\/li>\n\n\n\n
            • SiCOI \u8303\u56f4\uff1a\uff1c\u202f1000\u202f\u00c5\uff08\u8be5\u8303\u56f4\u53d7\u524d\u4e00\u5c42\/\u8584\u819c\u6750\u6599\u6570\u503c\u5f71\u54cd\uff09<\/strong><\/li>\n<\/ul>\n\n\n\n

              \u53ef\u52a0\u5de5\u6676\u5706\u7c7b\u578b\uff1aSOI\u3001SiO\u2082\u3001SiC \u590d\u5408\u886c\u5e95\u3001LNOI\u3001LTOI \u53ca\u5176\u4ed6\u9540\u819c\u6750\u6599<\/p>\n<\/div>\n\n\n\n

              \n

              \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

              \u591a\u79cd\u8584\u819c\u6750\u6599\u7684\u523b\u8680\u4e0e\u539a\u5ea6\u8c03\u8282<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

              \n
              \n

              \u7528\u4e8e\u5149\u5b50\u4e0e MEMS \u4e92\u8fde\u7684\u9ad8\u5747\u5300\u6027\u94dc\u7535\u9540<\/strong><\/strong><\/h2>\n\n\n\n

              \u7528\u4e8e\u9ad8\u7eb5\u6a2a\u6bd4 TSV\u3001\u6c9f\u69fd\u4e0e\u67f1\u4f53\u7684\u65e0\u7a7a\u6d1e\u94dc\u7535\u9540<\/strong><\/p>\n\n\n\n

                \n
              • \u5355\u6b65\u5de5\u827a\u7684\u5c42\u539a\u80fd\u529b\uff1a\uff1c\u202f1\u202f\u00b5m \u81f3 \uff1e\u202f100\u202f\u00b5m<\/li>\n\n\n\n
              • \u591a\u5c42 3D \u4e92\u8fde\u4e0e\u65e0\u7f1d\u901a\u5b54\u94fe\u5806\u53e0<\/li>\n\n\n\n
              • \u6676\u5706\u5185\u5747\u5300\u6027\uff1a\u2264\u202f2% (1\u03c3)<\/strong> \u6676\u5706\u95f4\u5747\u5300\u6027\uff1a\u2264\u202f1.5%<\/strong><\/li>\n\n\n\n
              • \u517c\u5bb9 LiNbO\u2083\u3001LTO\u3001SOI\u3001InP\u3001\u73bb\u7483\u53ca\u8584\u578b 8 \u82f1\u5bf8\u6676\u5706<\/li>\n\n\n\n
              • \u7528\u4e8e\u5149\u5b50\u91cd\u5206\u5e03\u5c42 (RDL)\u3001MEMS \u7ebf\u5708\u53ca\u8d85\u5bfc\u7ed3\u6784\u7684\u8d85\u4f4e\u5e94\u529b\uff08\uff1c\u202f30\u202fMPa\uff09\u4e0e\u9ad8\u7eaf\u5ea6\u94dc\uff08\uff1e\u202f99.99%\uff09<\/li>\n<\/ul>\n\n\n\n

                \u4ece\u8584\u578b\u79cd\u5b50\u5c42\u52a0\u56fa\u5230 \uff1e\u202f100\u202f\u00b5m \u539a\u7684\u7535\u6e90\u5e03\u7ebf\u2014\u201425FAB \u4e3a\u4e0b\u4e00\u4ee3\u6df7\u5408\u5149\u5b50\u5668\u4ef6\u63d0\u4f9b\u4e1a\u754c\u6700\u53ef\u9760\u7684\u94dc\u7535\u9540\u5de5\u827a\u3002<\/p>\n<\/div>\n\n\n\n

                \n

                \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                25FAB \u63d0\u4f9b\u65e0\u7a7a\u6d1e\u3001\u9ad8\u5747\u5300\u6027\u7684\u94dc\u7535\u9540\u5de5\u827a\uff0c\u5c42\u539a\u53ef\u8fbe \uff1e\u202f100\u202f\u00b5m\uff0c\u5e76\u5177\u5907\u591a\u5c42 3D \u4e92\u8fde\u80fd\u529b\uff0c\u9002\u7528\u4e8e 4\u20138 \u82f1\u5bf8\u5149\u5b50\u3001\u538b\u7535\u53ca\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6676\u5706\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                \n
                \n

                \u5148\u8fdb\u7684 PVD \u5de5\u827a\uff1a\u6e85\u5c04\u4e0e\u7535\u5b50\u675f\u84b8\u53d1<\/strong><\/h2>\n\n\n\n

                \u4ece 4 \u82f1\u5bf8\u5230\u5b8c\u6574\u7684 8 \u82f1\u5bf8\uff08200\u202fmm\uff09\u91cf\u4ea7\u5e73\u53f0<\/strong><\/strong><\/p>\n\n\n\n

                  \n
                • \u53cd\u5e94\u6027\u4e0e\u5171\u6e85\u5c04\uff1aPZT\u3001AlN\u3001ScAlN\u3001LiNbO\u2083\u3001SiO\u2082\u3001Al\u2082O\u2083\u3001TiO\u2082\u3001ITO\u3001HfO\u2082\u3001Ta\u2082O\u2085\uff08\u5747\u5300\u6027 \uff1c\u202f0.8% 1\u03c3\uff09<\/li>\n\n\n\n
                • \u7cbe\u5bc6\u91d1\u5c5e\u4e0e\u5408\u91d1\uff1aAl\u3001Cu\u3001Ti\u3001Ta\u3001Au\u3001Pt\u3001Ni\u3001Cr\u3001W\u3001Mo\uff0c\u5177\u5907 \u00b1\u202f10\u202fMPa \u5e94\u529b\u63a7\u5236<\/strong><\/li>\n\n\n\n
                • \u591a\u8154\u7535\u5b50\u675f\u84b8\u53d1\uff1a\u9002\u7528\u4e8e\u9ad8\u7194\u70b9\u91d1\u5c5e\u3001Lift\u2011Off \u7ed3\u6784\u53ca\u9ad8\u7eaf\u5ea6\u8d85\u5bfc\u8584\u819c<\/strong><\/li>\n\n\n\n
                • \u4f4e\u6e29\u5de5\u827a\uff08\uff1c\u202f150\u202f\u00b0C\uff09\uff0c\u5b8c\u5168\u517c\u5bb9 LNOI\u3001InP \u53ca\u8584\u578b\u6676\u5706<\/strong><\/li>\n\n\n\n
                • \u5355\u6b21\u5de5\u827a\u80fd\u529b\uff1a\u79cd\u5b50\u5c42\u3001RDL\u3001\u7535\u6781\u3001AR \u6d82\u5c42\u53ca\u590d\u6742\u538b\u7535\u5806\u6808<\/strong><\/li>\n<\/ul>\n<\/div>\n\n\n\n
                  \n

                  \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                  25FAB \u63d0\u4f9b\u7ecf\u8fc7\u91cf\u4ea7\u8ba4\u8bc1\u7684\u6e85\u5c04\u4e0e\u7535\u5b50\u675f\u84b8\u53d1\u5de5\u827a\uff0c\u53ef\u5bf9\u538b\u7535\u6750\u6599\u3001III-V \u5316\u5408\u7269\u3001\u91d1\u5c5e\u4ee5\u53ca\u9ad8 k\/\u8010\u706b\u4ecb\u7535\u6750\u6599\u8fdb\u884c\u539f\u5b50\u7ea7\u7cbe\u5ea6\u63a7\u5236\uff0c\u9002\u7528\u4e8e 4\u20138 \u82f1\u5bf8\u6676\u5706\u7684\u5149\u5b50\u3001MEMS \u4e0e\u91cf\u5b50\u5e94\u7528\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                  \n
                  \n

                  \u6676\u5706\u7ea7\u7eb3\u7c73\u538b\u5370\u5149\u523b\uff1a\u91c7\u7528 UV \u4e0e\u70ed\u5de5\u827a<\/strong><\/strong><\/h2>\n\n\n\n

                  \u4ece 4 \u82f1\u5bf8\u5230\u5b8c\u6574\u7684 8 \u82f1\u5bf8\u751f\u4ea7\u5e73\u53f0<\/strong><\/strong><\/p>\n\n\n\n

                    \n
                  • \u5206\u8fa8\u7387\uff1a\u53ef\u8fbe \u2264\u202f12\u202fnm\uff08\u534a\u95f4\u8ddd\uff09\uff0c\u5e76\u5728 200\u202fmm \u6676\u5706\u4e0a\u5b9e\u73b0 \uff1c\u202f30\u202fnm \u7684\u5e38\u89c4\u5de5\u827a<\/strong><\/li>\n\n\n\n
                  • \u53e0\u52a0\u7cbe\u5ea6\uff1a\u2264\u202f5\u202fnm (3\u03c3)\uff0c\u9002\u7528\u4e8e\u70ed\u56fa\u5316\u4e0e UV \u56fa\u5316\u5149\u523b\u80f6<\/strong><\/li>\n\n\n\n
                  • \u9ad8\u901a\u91cf\u538b\u5370\uff1a\uff1e\u202f60 \u7247\u6676\u5706\/\u5c0f\u65f6\uff0c\u9002\u7528\u4e8e\u91d1\u5c5e\u900f\u955c\u3001DOE\u3001AR\/VR \u6ce2\u5bfc\u3001\u5149\u5b50\u6676\u4f53\u53ca\u4e9a\u6ce2\u957f\u5149\u6805<\/strong><\/li>\n\n\n\n
                  • \u5168\u6d41\u7a0b\u670d\u52a1\uff1a\u6bcd\u7248\u5236\u4f5c\uff08EBL\/\u6b65\u8fdb\u5149\u523b\uff09\u3001\u5de5\u4f5c\u6a21\u5177\u590d\u5236\uff08\u8f6f\u6a21 & \u786c\u6a21\uff09\u3001\u538b\u5370 + RLT \u4ee5\u53ca\u91d1\u5c5e\u5316<\/strong><\/li>\n\n\n\n
                  • \u517c\u5bb9\u6027\uff1aLiNbO\u2083\u3001LNOI\u3001SOI\u3001\u77f3\u82f1\u3001\u73bb\u7483\u53ca\u67d4\u6027\u57fa\u5e95<\/strong><\/li>\n\n\n\n
                  • \u7f3a\u9677\u5bc6\u5ea6\uff1a\uff1c\u202f0.1\/cm\u00b2<\/strong><\/li>\n\n\n\n
                  • \u6b8b\u7559\u5c42\u539a\u5ea6 (RLT)\uff1a\uff1c\u202f8\u202fnm<\/strong><\/li>\n\n\n\n
                  • \u5747\u5300\u6027\uff1a\uff1c\u202f3%<\/strong><\/li>\n<\/ul>\n\n\n\n

                    \u4ece\u5355\u4e2a\u539f\u578b\u5230\u6bcf\u5c0f\u65f6\u8d85\u8fc7 10k+ \u6676\u5706 \u2014\u2014 \u901a\u5f80\u4e9a 20\u202fnm \u5149\u5b50\u7eb3\u7c73\u7ed3\u6784\u6700\u5feb\u7684\u5e02\u573a\u9014\u5f84<\/strong><\/strong><\/p>\n<\/div>\n\n\n\n

                    \n

                    \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                    25QFAB \u63d0\u4f9b\u4ea4\u94a5\u5319\u3001\u5177\u5907\u91cf\u4ea7\u80fd\u529b\u7684 UV \u4e0e\u70ed\u7eb3\u7c73\u538b\u5370\u5149\u523b\u5de5\u827a\uff0c\u5206\u8fa8\u7387 \u2264\u202f12\u202fnm\uff0c\u53e0\u52a0\u7cbe\u5ea6 \u2264\u202f5\u202fnm\uff0c\u5e76\u5177\u5907\u5b8c\u6574\u7684 200\u202fmm \u6676\u5706\u7ea7\u80fd\u529b\uff0c\u9002\u7528\u4e8e\u5149\u5b50\u5b66\u3001\u8d85\u8868\u9762\u53ca AR\/VR \u5149\u5b66\u3002<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                    \n
                    \n

                    \u6676\u5706\u68c0\u6d4b\u7cfb\u7edf\u7528\u4e8e\u7f3a\u9677\u8bc6\u522b<\/strong><\/strong><\/h2>\n\n\n\n

                    4 \u82f1\u5bf8\u81f3 8 \u82f1\u5bf8\u81ea\u52a8\u5316\u68c0\u6d4b\u4e0e\u5206\u7c7b<\/strong><\/strong><\/p>\n\n\n\n

                      \n
                    • \u6676\u5706\u5c3a\u5bf8\uff1a4\u2033 \/ 6\u2033 \/ 8\u2033\uff08\u539a\u5ea6 290\u20131000\u202f\u00b5m\uff09<\/strong><\/li>\n\n\n\n
                    • \u68c0\u6d4b\u7075\u654f\u5ea6\uff1a\u2265\u202f0.2\u202f\u00b5m \u9897\u7c92\u4e0e\u7f3a\u9677\uff08\u660e\u573a\u3001\u6697\u573a\u53ca\u5149\u81f4\u53d1\u5149\u6a21\u5f0f\uff09<\/strong><\/li>\n\n\n\n
                    • \u652f\u6301\u7684\u6750\u6599\uff1aSi\u3001SiC\u3001LiNbO\u2083 (LN)\u3001LiTaO\u2083 (LT)\u3001LNOI\/LTOI\u3001SOI\u3001\u77f3\u82f1\u3001\u73bb\u7483\u3001GaN\u3001InP\uff0c\u4ee5\u53ca\u6240\u6709\u590d\u5408\/\u5f02\u8d28\u5149\u5b50\u6676\u5706<\/strong><\/li>\n\n\n\n
                    • \u529f\u80fd\uff1a\u5168\u5e45\u5b8f\u89c2\u4e0e\u5fae\u89c2\u68c0\u6d4b\u3001\u81ea\u52a8\u5316\u7f3a\u9677\u5206\u7c7b\u4ee5\u53ca KLARF \u5bfc\u51fa<\/strong><\/li>\n\n\n\n
                    • \u96c6\u6210\uff1a\u5d4c\u5165\u6211\u4eec\u7684\u8ba1\u91cf\u96c6\u7fa4\uff0c\u53ef\u5728\u5149\u523b\u3001\u523b\u8680\u548c\u6c89\u79ef\u5de5\u827a\u4e2d\u63d0\u4f9b\u5373\u65f6\u53cd\u9988<\/strong><\/li>\n<\/ul>\n\n\n\n

                      \u6ca1\u6709\u76f2\u70b9\u3002\u6ca1\u6709\u9003\u9038\u7684\u7f3a\u9677\u3002\u6bcf\u4e00\u4e2a\u5173\u952e\u9519\u8bef\u90fd\u4f1a\u5728\u5f71\u54cd\u60a8\u7684\u826f\u7387\u4e4b\u524d\u88ab\u8bc6\u522b\u51fa\u6765\u3002<\/strong><\/strong><\/p>\n<\/div>\n\n\n\n

                      \n

                      \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                      25FAB \u63d0\u4f9b\u81ea\u52a8\u5316\u7f3a\u9677\u68c0\u6d4b\u4e0e\u5206\u7c7b \u2265\u202f0.2\u202f\u00b5m\uff08\u660e\u573a\/\u6697\u573a\/\u5149\u81f4\u53d1\u5149\uff09\uff0c\u9002\u7528\u4e8e 4\u20138 \u82f1\u5bf8 Si\u3001SiC\u3001LiNbO\u2083\u3001LiTaO\u2083 \u4ee5\u53ca\u6240\u6709\u5149\u5b50\u4e0e\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6676\u5706\uff0c\u5e76\u5177\u5907\u5b8c\u6574\u7684\u53ef\u8ffd\u6eaf\u6027\u4e0e\u5de5\u827a\u5faa\u73af\u96c6\u6210\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                      \n
                      \n

                      \u6676\u5706\u7684\u7cbe\u786e\u4fee\u6574\u4e0e\u8fb9\u7f18\u8f6e\u5ed3\u52a0\u5de5<\/strong><\/strong><\/h2>\n\n\n\n

                      \u6676\u5706\u5c3a\u5bf8\uff1a\u6700\u5927\u81f3 8 \u82f1\u5bf8\uff08200\u202fmm\uff09\u5168\u6676\u5706\u53ca\u975e\u6807\u51c6\u5316\u886c\u5e95\u5f62\u72b6<\/strong> \u539a\u5ea6\u8303\u56f4\uff1a\u2264\u202f1000\u202f\u00b5m\uff08\u539f\u59cb\u6750\u6599\uff09<\/strong> \u8fb9\u7f18\u52a0\u5de5\uff1a\u4fee\u6574\u4e0e\u5012\u89d2\uff0c\u7cbe\u5ea6\u8fbe\u5fae\u7c73\u7ea7<\/strong> \u6750\u6599\uff1aLiNbO\u2083\u3001LiTaO\u2083\u3001LNOI\/LTOI\u3001\u77f3\u82f1\u3001\u84dd\u5b9d\u77f3\u3001SiC\u3001GaN\u3001InP\u3001SOI\u3001\u73bb\u7483\uff0c\u4ee5\u53ca\u6240\u6709\u952e\u5408\u6216\u590d\u5408\u886c\u5e95<\/strong> \u7ed3\u679c\uff1a\u8fb9\u7f18\u6d01\u51c0\u3001\u65e0\u5d29\u88c2 \u2014\u2014 \u517c\u5bb9\u540e\u7eed\u5149\u523b\u4e0e\u952e\u5408\u5de5\u827a\u3002<\/strong><\/p>\n<\/div>\n\n\n\n

                      \n

                      \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                      25FAB \u63d0\u4f9b\u7cbe\u786e\u7684\u6676\u5706\u4fee\u6574\u3001\u8fb9\u7f18\u8f6e\u5ed3\u52a0\u5de5\u4e0e\u5012\u89d2\uff0c\u9002\u7528\u4e8e\u6240\u6709 \u2264\u202f8 \u82f1\u5bf8\u6807\u51c6\u53ca\u975e\u6807\u51c6\u886c\u5e95\uff0c\u5305\u62ec\u654f\u611f\u7684\u538b\u7535\u4e0e\u5149\u5b50\u6750\u6599\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                      \n
                      \n

                      \u8ba1\u91cf\uff1a\u7528\u4e8e\u7cbe\u786e\u7684\u6676\u5706\u5e73\u6574\u5ea6\u4e0e\u51e0\u4f55\u6d4b\u91cf<\/strong><\/strong><\/h2>\n\n\n\n

                      4 \u82f1\u5bf8\u81f3 8 \u82f1\u5bf8 | \u539a\u5ea6 300\u20131000\u202f\u00b5m<\/strong><\/strong><\/p>\n\n\n\n

                        \n
                      • \u53cc\u9762\u5e72\u6d89\u6d4b\u91cf + \u7535\u5bb9\u6d4b\u91cf<\/strong><\/strong><\/li>\n\n\n\n
                      • \u5173\u952e\u53c2\u6570\uff1a<\/strong><\/strong>\n
                          \n
                        • TTV \u2264\u202f0,3\u202f\u00b5m<\/li>\n\n\n\n
                        • LTV \u2264\u202f0,2\u202f\u00b5m<\/li>\n\n\n\n
                        • \u7fd8\u66f2\/\u5f2f\u66f2 \u2264\u202f3\u202f\u00b5m<\/strong><\/li>\n\n\n\n
                        • \u539a\u5ea6\u53d8\u5316 \u2264\u202f0.5\u202f\u00b5m\uff08200\u202fmm \u8303\u56f4\u5185 3\u03c3\uff09<\/strong><\/li>\n<\/ul>\n<\/li>\n\n\n\n
                        • \u5168\u5e45\u9ad8\u5bc6\u5ea6\u6620\u5c04\uff1a>\u202f100 \u4e07\u6d4b\u91cf\u70b9\/\u6676\u5706\uff0c\u8017\u65f6 <\u202f60 \u79d2<\/strong><\/li>\n\n\n\n
                        • \u517c\u5bb9\u886c\u5e95\uff1aLiNbO\u2083\u3001LTO\u3001LNOI\u3001SOI\u3001SiC\u3001GaN\u3001InP\u3001\u77f3\u82f1\u3001\u73bb\u7483\uff0c\u4ee5\u53ca\u6240\u6709\u952e\u5408\u4e0e\u51cf\u8584\u6676\u5706<\/strong><\/li>\n\n\n\n
                        • \u5b9e\u65f6\u62a5\u544a\uff1aGBIR\/SBIR\/SFQR\uff0c\u5e76\u76f4\u63a5\u524d\u9988\u81f3 CMP\u3001\u952e\u5408\u4e0e\u5149\u523b\u8bbe\u5907<\/strong><\/li>\n<\/ul>\n\n\n\n

                          \u4fdd\u8bc1\u5b8c\u7f8e\u7684\u5e73\u6574\u5ea6\uff0c\u7528\u4e8e 3D \u96c6\u6210\u3001\u6676\u5706\u952e\u5408\u4ee5\u53ca\u8d85\u8584\u5149\u5b50\u5668\u4ef6\u3002<\/strong><\/strong><\/p>\n<\/div>\n\n\n\n

                          \n

                          \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                          25FAB \u63d0\u4f9b\u4e9a\u5fae\u7c73\u7ea7\u8ba1\u91cf\uff0c\u7528\u4e8e TTV\u3001\u7fd8\u66f2\u3001\u5f2f\u66f2\u4e0e\u539a\u5ea6\u6d4b\u91cf\uff0c\u5e76\u5bf9\u6240\u6709 4\u20138 \u82f1\u5bf8\u886c\u5e95\u8fdb\u884c\u5b8c\u6574\u7684\u51e0\u4f55\u8868\u5f81 \u2014\u2014 \u4ece\u6807\u51c6\u7845\u5230\u654f\u611f\u7684\u538b\u7535\u4e0e\u952e\u5408\u5149\u5b50\u6676\u5706\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                          \n
                          \n

                          \u57fa\u4e8e\u53cc\u5149\u5b50\u805a\u5408\u7684 3D \u6253\u5370\u670d\u52a1\uff0c\u91c7\u7528 Nanoscribe \u6280\u672f<\/strong><\/strong><\/h2>\n\n\n\n

                          \u5728 4\u20138 \u82f1\u5bf8\u6676\u5706\u4e0e\u5149\u7ea4\u4e0a\u5b9e\u73b0\u771f\u6b63\u7684\u4e9a\u5fae\u7c73\u7ea7\u76f4\u63a5\u7ed3\u6784\u5316<\/strong><\/strong><\/p>\n\n\n\n

                            \n
                          • \u8bbe\u5907\u914d\u7f6e\uff1aNanoscribe Photonics Professional GT2 + Quantum X align<\/strong><\/li>\n\n\n\n
                          • \u6a2a\u5411\u7ed3\u6784\u5c3a\u5bf8\uff1a\u5178\u578b\u503c 160\u202fnm\uff0c\u4fdd\u8bc1 \u2264\u202f200\u202fnm<\/strong><\/li>\n\n\n\n
                          • \u5782\u76f4\u5206\u8fa8\u7387\uff1a\u5178\u578b\u503c 400\u20131000\u202fnm<\/strong><\/li>\n\n\n\n
                          • \u6700\u5927\u5355\u573a\u4f53\u79ef\uff1a500 \u00d7 500 \u00d7 300\u202f\u00b5m\uff08\u65e0\u7f1d\uff0c\u65e0\u62fc\u63a5\uff09<\/strong><\/li>\n\n\n\n
                          • \u6298\u5c04\u7387\uff1an = 1.56\uff08IP\u2011Dip \/ \u53ef\u63d0\u4f9b\u5b9a\u5236\u7684\u9ad8\u6298\u5c04\u7387\u5149\u523b\u80f6\uff09<\/strong><\/li>\n\n\n\n
                          • \u886c\u5e95\uff1aLNOI\u3001SOI\u3001\u73bb\u7483\u3001\u77f3\u82f1\u3001\u5149\u7ea4\u7aef\u9762\u3001InP\u3001GaN\u3001\u9884\u7ed3\u6784\u5316\u82af\u7247<\/strong><\/li>\n\n\n\n
                          • \u6210\u719f\u7ed3\u6784\uff1a\u5149\u7ea4\u7aef\u9762\u91d1\u5c5e\u900f\u955c\u3001\u9ad8 NA \u81ea\u7531\u66f2\u9762\u900f\u955c\u3001\u5fae\u9488\u30013D \u5149\u5b50\u7ebf\u952e\u5408\u3001\u884d\u5c04\u5143\u4ef6\u3001\u5149\u5b50\u6676\u4f53 Woodpile \u7ed3\u6784\u3001AR\/VR \u8fd1\u773c\u5149\u5b66<\/strong><\/li>\n<\/ul>\n\n\n\n

                            \u5728\u5149\u5b50\u82af\u7247\u6216\u5149\u7ea4\u7aef\u9762\u4e0a\u5b9e\u73b0 3D \u7eb3\u7c73\u5149\u5b66\u7684\u65e0\u7f1d\u96c6\u6210 \u2014\u2014 \u4ece\u5355\u4e2a\u539f\u578b\u5230\u6bcf\u7247\u6676\u5706\u4e0a\u7684\u6570\u5343\u4e2a\u5668\u4ef6\u3002<\/strong><\/strong><\/p>\n<\/div>\n\n\n\n

                            \n

                            \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                            25FAB \u63d0\u4f9b\u884c\u4e1a\u9886\u5148\u7684 Nanoscribe 3D \u6253\u5370\u670d\u52a1\uff0c\u57fa\u4e8e\u53cc\u5149\u5b50\u805a\u5408\u6280\u672f\uff0c\u5728\u6676\u5706\u3001\u5149\u7ea4\u53ca\u9884\u7ed3\u6784\u5316\u5149\u5b50\u82af\u7247\u4e0a\u5b9e\u73b0 \u2264\u202f160\u202fnm \u6a2a\u5411\u5206\u8fa8\u7387\uff0c\u7528\u4e8e\u91d1\u5c5e\u900f\u955c\u3001\u5149\u7ea4\u7aef\u9762\u5149\u5b66\u5668\u4ef6\u3001\u81ea\u7531\u66f2\u9762\u5fae\u5149\u5b66\u4ee5\u53ca 3D \u5f02\u8d28\u96c6\u6210\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                            \n
                            \n

                            \u7528\u4e8e\u538b\u7535\u8584\u819c\u5168\u9762\u8868\u5f81\u7684\u5b9e\u9a8c\u5ba4<\/strong><\/strong><\/h2>\n\n\n\n

                            \u5b8c\u6574\u7684 4\u20138 \u82f1\u5bf8\u6676\u5706\u6620\u5c04 | \u5177\u5907\u91cf\u4ea7\u7ea7\u7cbe\u5ea6<\/strong><\/strong><\/p>\n\n\n\n

                              \n
                            • d\u2083\u2083 \u4e0e d\u2083\u2081 \u7cfb\u6570\uff1a\u76f4\u63a5\u538b\u7535\u54cd\u5e94\uff08Aixacct TF\u20112000E \u4e0e\u53cc\u5149\u675f LVP\uff09\uff0c\u5e38\u89c4\u6d4b\u5f97 AlScN >\u202f250\u202fpm\/V\uff0cPZT >\u202f150\u202fpm\/V<\/strong><\/li>\n\n\n\n
                            • e\u2083\u2081,eff \u6620\u5c04\uff1a\u6676\u5706\u7ea7\u5f2f\u66f2\u6cd5\uff0c\u5728 200\u202fmm \u8303\u56f4\u5185\u975e\u5747\u5300\u6027 <\u202f3\u202f%<\/strong><\/li>\n\n\n\n
                            • P\u2011E \u6ede\u56de\u4e0e\u75b2\u52b3\uff1a\u6700\u9ad8\u53ef\u8fbe 1\u202fMV\/cm\uff0c>\u202f10\u00b9\u2070 \u6b21\u5faa\u73af\u8d1f\u8f7d\u6d4b\u8bd5<\/strong><\/li>\n\n\n\n
                            • \u4ecb\u7535\u5e38\u6570\u4e0e\u635f\u8017\uff1a1\u202fkHz\u201310\u202fMHz\uff0c\u5178\u578b tan\u03b4 <\u202f0.01<\/strong><\/li>\n\n\n\n
                            • \u6f0f\u7535\u6d41\uff1afA \u5206\u8fa8\u7387\uff0c\u51fb\u7a7f\u7535\u573a >\u202f8\u202fMV\/cm<\/strong><\/li>\n\n\n\n
                            • \u6574\u7247\u6676\u5706\u94c1\u7535\u5747\u5300\u6027\u6620\u5c04\uff1a49\u2013121 \u4e2a\u6d4b\u91cf\u70b9\uff0c\u8017\u65f6 <\u202f30\u202f\u5206\u949f<\/strong><\/li>\n\n\n\n
                            • \u5c45\u91cc\u6e29\u5ea6\u4e0e\u76f8\u4f4d\u786e\u8ba4\uff1a\u539f\u4f4d\u52a0\u70ed + \u62c9\u66fc\/ XRD<\/strong><\/li>\n<\/ul>\n\n\n\n

                              \u6240\u6709\u6d4b\u91cf\u5747\u7ecf\u6821\u51c6\u5e76\u53ef\u8ffd\u6eaf\u81f3 PTB\/NIST \u6807\u51c6\uff0c\u6d4b\u8bd5\u62a5\u544a\u5df2\u83b7\u5168\u7403\u9886\u5148\u7684\u5c04\u9891\u6ee4\u6ce2\u5668\u3001PMUT \u548c TFLN \u8c03\u5236\u5668\u5ba2\u6237\u8ba4\u53ef\u3002<\/strong><\/strong><\/p>\n<\/div>\n\n\n\n

                              \n

                              \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                              25FAB \u63d0\u4f9b\u5b8c\u6574\u7684\u7535\u5b66\u4e0e\u538b\u7535\u5b66\u8868\u5f81\uff08d\u2083\u2083\u3001e\u2083\u2081\u3001P\u2011E\u3001\u75b2\u52b3\u3001\u6f0f\u7535\u6d41\u3001\u4ecb\u7535\u6027\u80fd\uff09\uff0c\u5e76\u652f\u6301\u5728 4\u20138 \u82f1\u5bf8 AlN\u3001ScAlN\u3001PZT\u3001PLZT \u4e0e LN \u8584\u819c\u4e0a\u7684\u6676\u5706\u7ea7\u6620\u5c04\uff0c\u7528\u4e8e\u91cf\u4ea7\u653e\u884c\u4e0e\u5de5\u827a\u9a8c\u8bc1\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                              \n
                              \n

                              \u7528\u4e8e\u5149\u5b50\u4e0e\u538b\u7535\u5668\u4ef6\u7684 FIB \u4e0e TEM \u5206\u6790<\/strong><\/strong><\/h2>\n\n\n\n

                              TEM \u8584\u7247\u5236\u5907\uff1aFEI Helios G4 CX \u4e0e Scios 2 \u53cc\u675f FIB<\/strong><\/strong><\/p>\n\n\n\n

                                \n
                              • \u5e38\u89c4\u539a\u5ea6 \u2264\u202f30\u202fnm\uff08\u5bf9 HR\u2011TEM\/STEM \u81f3\u5173\u91cd\u8981\uff09<\/strong><\/li>\n\n\n\n
                              • \u4fdd\u62a4\u5c42 Pt \/ \u9488\u5bf9 GaN \u7684\u4f4e\u7535\u538b\u6e05\u6d17\uff0c\u975e\u6676\u8fb9\u7f18\u635f\u4f24 <\u202f2\u202fnm<\/strong><\/li>\n\n\n\n
                              • \u5728 LiNbO\u2083\u3001AlScN\u3001PZT\u3001LNOI\u3001InP\u2011PICs \u4e0e\u8d85\u8868\u9762\u4e0a\u7684\u7a7a\u95f4\u5206\u8fa8\u622a\u9762\u5206\u6790<\/strong><\/li>\n\n\n\n
                              • \u9ad8\u901a\u91cf\uff1a\u6bcf 8 \u5c0f\u65f6\u73ed\u6b21\u53ef\u5236\u5907 4\u20136 \u4e2a\u5b8c\u7f8e\u8584\u7247<\/strong><\/li>\n<\/ul>\n\n\n\n

                                \u539f\u5b50\u7ea7\u5206\u8fa8\u7387 TEM\/STEM\uff1aThermo Fisher Spectra 300 Cs \u6821\u6b63\uff08300\u202fkV\uff09<\/strong><\/strong><\/p>\n\n\n\n

                                \u5e38\u89c4 EELS \u4e0e EDX \u6620\u5c04\uff1aAlScN \u4e2d Sc \u63ba\u6742\u5206\u5e03\u3001LN \u4e2d\u7684\u7574\u7ed3\u6784\u3001LNOI \u5806\u6808\u4e2d\u7684\u754c\u9762\u8d28\u91cf<\/strong><\/p>\n\n\n\n

                                \u5206\u8fa8\u7387\uff1a0.06\u202fnm\uff08STEM\uff09\uff0c0.12\u202fnm\uff08TEM\uff09<\/strong><\/p>\n<\/div>\n\n\n\n

                                \n

                                \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                                25FAB \u63d0\u4f9b\u65e0\u635f FIB\u2011TEM \u6837\u54c1\u5236\u5907\uff08<\u202f30\u202fnm \u8584\u7247\uff09\uff0c\u5e76\u5728\u6240\u6709 4\u20138 \u82f1\u5bf8\u5149\u5b50\u3001\u538b\u7535\u4e0e\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5668\u4ef6\u4e0a\u5f00\u5c55\u539f\u5b50\u7ea7\u5206\u8fa8\u7387\u3001Cs \u6821\u6b63\u7684 TEM\/STEM\/EELS \u5206\u6790\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n

                                \n
                                \n

                                \u7528\u4e8e\u8868\u9762\u4e0e\u6750\u6599\u8868\u5f81\u7684\u7efc\u5408\u5e73\u53f0<\/strong><\/strong><\/h2>\n\n\n\n

                                \u539f\u5b50\u529b\u663e\u5fae\u955c (AFM, Bruker Dimension Icon)\uff1a<\/strong><\/strong><\/p>\n\n\n\n

                                  \n
                                • \u5728\u629b\u5149\u7684 LN\/Si\u2083N\u2084 \u8868\u9762\u4e0a\u5b9e\u73b0 Ra <\u202f0.1\u202fnm<\/strong><\/li>\n\n\n\n
                                • \u5cf0\u503c\u529b QNM<\/strong><\/li>\n\n\n\n
                                • \u5bfc\u7535\u539f\u5b50\u529b\u663e\u5fae\u955c<\/li>\n\n\n\n
                                • \u538b\u7535\u54cd\u5e94 (PFM) \u6676\u5706\u6620\u5c04<\/strong><\/li>\n<\/ul>\n\n\n\n

                                  \u573a\u53d1\u5c04\u626b\u63cf\u7535\u5b50\u663e\u5fae\u955c (FE\u2011SEM, Zeiss Gemini 500)\uff1a<\/strong><\/strong><\/p>\n\n\n\n

                                    \n
                                  • \u5206\u8fa8\u7387\uff1a0.8\u202fnm @ 15\u202fkV<\/strong><\/li>\n\n\n\n
                                  • In\u2011Lens\/SE\/BSE \u63a2\u6d4b\u6a21\u5f0f<\/strong><\/li>\n\n\n\n
                                  • \u4f4e\u7535\u538b\u6210\u50cf LNOI\/TFLN\uff0c\u65e0\u5145\u7535\u6548\u5e94<\/strong><\/li>\n<\/ul>\n\n\n\n

                                    EDS\/EDX (Oxford X\u2011Max\u207f 150\u202fmm\u00b2):<\/strong><\/p>\n\n\n\n

                                      \n
                                    • \u5143\u7d20\u6620\u5c04\uff1a\u4ece B \u5230 U<\/strong><\/li>\n\n\n\n
                                    • AlScN \u4e2d Sc \u5206\u5e03<\/strong><\/li>\n\n\n\n
                                    • \u952e\u5408\u5806\u6808\u4e2d\u7684\u754c\u9762\u5206\u6790<\/strong><\/li>\n<\/ul>\n\n\n\n

                                      \u96c6\u6210\u5316\u5de5\u4f5c\u6d41\u7a0b\uff1a<\/strong><\/strong><\/p>\n\n\n\n

                                      <\u202f30\u202f\u5206\u949f SEM\u2192AFM\u2192EDX \u4ea4\u53c9\u5173\u8054<\/strong><\/p>\n\n\n\n

                                      \u9002\u7528\u4e8e 4\u20138 \u82f1\u5bf8\u6676\u5706\u7684\u8f7d\u53f0<\/strong><\/p>\n<\/div>\n\n\n\n

                                      \n

                                      \u4e3b\u8981\u529f\u80fd<\/strong>:<\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/strong><\/p>\n\n\n\n

                                      25FAB \u63d0\u4f9b AFM\uff08\u5f62\u8c8c\u3001PFM\u3001c\u2011AFM\uff09\u3001\u9ad8\u5206\u8fa8\u7387 FE\u2011SEM \u4ee5\u53ca\u5b9a\u91cf EDX \u5206\u6790\uff0c\u5e76\u53ef\u5bf9\u5149\u5b50\u3001\u538b\u7535\u4e0e\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6750\u6599\u8fdb\u884c\u5b8c\u6574\u7684 200\u202fmm \u6676\u5706\u6620\u5c04\u3002<\/strong><\/strong><\/p>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"

                                      \u670d\u52a1 -> \u5fae\u7eb3\u5236\u9020 \u5fae\u7eb3\u52a0\u5de5\u670d\u52a1 \u5149\u523b \u7cbe\u5bc6\u5149\u523b\u4ee3\u5de5\u5382\u2014\u201410nm\u81f3100nm\uff0c4\u82f1\u5bf8\u81f38\u82f1\u5bf8\u6676\u5706 25FAB \u63d0\u4f9b\u4e00\u5957\u5168\u9762\u7684\u5185\u90e8\u5149\u523b\u5957\u4ef6\uff0c\u53ef\u65e0\u7f1d\u96c6\u6210\uff1a \u6240\u6709\u5de5\u827a\u5747\u9075\u5faa\u7edf\u4e00\u7684\u8bbe\u8ba1\u89c4\u5219\u548c\u8ba1\u91cf\u6807\u51c6\uff0c\u786e\u4fdd\u4ece 10nm \u7814\u53d1\u5230 100nm \u5927\u6279\u91cf 8 \u82f1\u5bf8\u751f\u4ea7\u7684\u8fc7\u6e21\u65e0\u98ce\u9669\u3002 \u5f53\u7cbe\u5ea6\u3001\u53ef\u6269\u5c55\u6027\u548c\u53ef\u9760\u6027\u81f3\u5173\u91cd\u8981\u65f6\uff0c25FAB \u53ef\u63d0\u4f9b\u65e0\u4e0e\u4f26\u6bd4\u7684\u5149\u523b\u7075\u6d3b\u6027\u3002 \u4e3b\u8981\u529f\u80fd\uff1a 25FAB \u63d0\u4f9b\u5168\u7403\u6700\u5e7f\u6cdb\u7684\u5149\u523b\u4ea7\u54c1\u7ec4\u5408\u2014\u2014\u4ece \u226410nm EBL \u5230 100nm \u5168\u5c3a\u5bf8 8 \u82f1\u5bf8 DUV \u6b65\u8fdb\u5149\u523b\u673a\u2014\u2014\u80fd\u591f\u5728\u5355\u4e00\u4ee3\u5de5\u5382\u5185\u5b9e\u73b0\u4ece\u6700\u9ad8\u5206\u8fa8\u7387\u7814\u7a76\u5230\u5927\u6279\u91cf\u6279\u91cf\u751f\u4ea7\u7684\u65e0\u7f1d\u8fc7\u6e21\u3002 \u8680\u523b \u4e1a\u754c\u9886\u5148\u7684\u538b\u7535\u548c\u5149\u5b50\u8584\u819c\u5e72\u6cd5\u523b\u8680\u6280\u672f\u3002\u5177\u5907\u5b8c\u6574\u7684 4 \u82f1\u5bf8\u81f3 8 \u82f1\u5bf8\u523b\u8680\u80fd\u529b\uff08\u4ee5\u53ca\u82af\u7247\/\u90e8\u4ef6\u52a0\u5de5\uff09\uff0c\u62e5\u6709\u6700\u5168\u9762\u7684\u5e72\u6cd5\u523b\u8680\u4ea7\u54c1\u7ec4\u5408\uff0c\u9002\u7528\u4e8e LiNbO\u2083\u3001LTO\u3001PLZT\u3001PZT\u3001AlN\u3001ScAlN\u3001\u77f3\u82f1\u4ee5\u53ca\u6240\u6709\u538b\u7535\/\u5149\u5b50\u8584\u819c\uff1a \u5747\u5300\u6027 <1.5% (3\u03c3)\uff0c\u4fa7\u58c1\u7c97\u7cd9\u5ea6 <1.5nm RMS\uff0c\u65e0\u635f\u4f24\u8f6e\u5ed3\u2014\u2014\u5df2\u5728\u5b8c\u6574\u7684 200mm \u6676\u5706\u4e0a\u5f97\u5230\u9a8c\u8bc1\u3002 \u4e3b\u8981\u529f\u80fd\uff1a \u5bf9\u94cc\u9178\u9502 (LiNbO\u2083)\u3001\u6c27\u5316\u949b (LTO)\u3001\u538b\u7535\u9676\u74f7 (PLZT)\u3001\u9506\u949b\u9178\u94c5 (PZT)\u3001\u6c2e\u5316\u94dd (AlN)\u3001\u6c2e\u5316\u7845 (AlScN)\u3001\u6c2e\u5316\u7845 (Si\u2083N\u2084)\u3001\u4e8c\u6c27\u5316\u7845 (SiO\u2082)\u3001\u91d1\u5c5e\uff08\u94dd\/\u949b\/\u94bd\/\u94a8\/\u91d1\/\u94dc\uff09\u4ee5\u53ca\u6240\u6709\u76f8\u5173\u7684\u5149\u5b50\/\u538b\u7535\u5806\u53e0\u8fdb\u884c\u65e0\u635f\u3001\u8d85\u7cbe\u786e\u7684\u5e72\u6cd5\u523b\u8680\uff08ICP\/RIE\/DRIE\/IBE\/\u84b8\u6c7d-HF \u548c XeF\u2082\uff09\u2014\u2014\u4ece\u5355\u4e2a\u82af\u7247\u5230\u5b8c\u6574\u7684 […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-home-cn","meta":{"footnotes":""},"class_list":["post-746","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/746","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/comments?post=746"}],"version-history":[{"count":31,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/746\/revisions"}],"predecessor-version":[{"id":1446,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/746\/revisions\/1446"}],"wp:attachment":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/media?parent=746"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}