{"id":720,"date":"2025-12-03T18:36:12","date_gmt":"2025-12-03T18:36:12","guid":{"rendered":"https:\/\/25fab.ch\/?page_id=720"},"modified":"2026-02-02T20:17:33","modified_gmt":"2026-02-02T20:17:33","slug":"piezo-microphone-array-cn","status":"publish","type":"page","link":"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-cn\/","title":{"rendered":"piezo-microphone-array-cn"},"content":{"rendered":"\n<p class=\"is-style-default has-fira-code-font-family\">\u9879\u76ee -&gt; \u538b\u7535\u9ea6\u514b\u98ce\u9635\u5217<\/p>\n\n\n\n<div class=\"wp-block-group is-nowrap is-layout-flex wp-container-core-group-is-layout-6c531013 wp-block-group-is-layout-flex\">\n<div class=\"wp-block-group has-global-padding is-layout-constrained wp-block-group-is-layout-constrained\">\n<figure class=\"wp-block-gallery has-nested-images columns-default is-cropped wp-block-gallery-1 is-layout-flex wp-block-gallery-is-layout-flex\">\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-en\/\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"597\" data-id=\"218\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg\" alt=\"\" class=\"wp-image-218\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-300x175.jpeg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-768x448.jpeg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk.jpeg 1280w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-de\/\"><img loading=\"lazy\" decoding=\"async\" width=\"189\" height=\"113\" data-id=\"213\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_swiss.png\" alt=\"\" class=\"wp-image-213\" style=\"width:40px\"\/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-cn\/\"><img loading=\"lazy\" decoding=\"async\" width=\"960\" height=\"640\" data-id=\"707\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg\" alt=\"\" class=\"wp-image-707\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg 960w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-300x200.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-768x512.jpg 768w\" sizes=\"auto, (max-width: 960px) 100vw, 960px\" \/><\/a><\/figure>\n<\/figure>\n<\/div>\n<\/div>\n\n\n\n<p>\u5df2\u5728\u7a7a\u5ba2 BACCHUS \u6c14\u52a8\u58f0\u5b66\u8bd5\u9a8c\u53f0\u4e0a\u6210\u529f\u9a8c\u8bc1<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-28f84493 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-vertically-aligned-center is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image aligncenter size-large\" style=\"margin-bottom:0\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"561\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png\" alt=\"\" class=\"wp-image-282\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-300x164.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-768x421.png 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE.png 1031w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"605\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/aerocoustic_-1024x605.jpg\" alt=\"\" class=\"wp-image-871\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/aerocoustic_-1024x605.jpg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/aerocoustic_-300x177.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/aerocoustic_-768x454.jpg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/aerocoustic_.jpg 1143w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"576\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg\" alt=\"\" class=\"wp-image-428\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-300x169.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-768x432.jpg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1.jpg 1067w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"847\" height=\"494\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png\" alt=\"\" class=\"wp-image-698\" style=\"width:931px;height:auto\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png 847w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-300x175.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-768x448.png 768w\" sizes=\"auto, (max-width: 847px) 100vw, 847px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-block-column-is-layout-flow\">\n<p><strong>\u7b2c\u4e00\u4ee3 (SAL)\uff1aAlSc30%N \u6280\u672f (20\u201355 kHz)\uff0c\u7531 Silicon Austria Labs \u5f00\u53d1<\/strong><\/p>\n\n\n\n<p><strong>\u7b2c\u4e8c\u4ee3 (25FAB)\uff1a\u9ad8\u6027\u80fd AlSc40%N \u6280\u672f\uff0c\u5e94\u7528\u4e8e 8\/12 \u82f1\u5bf8\u6676\u5706 (10\u2013100 kHz)<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>\u53cc\u9891\u94dd\u94aa\u6c2e\u5316\u7269\u538b\u7535\u9ea6\u514b\u98ce\uff0c\u5177\u6709\u5bbd\u5e26\u5bbd\u3001\u5927\u52a8\u6001\u8303\u56f4\u548c\u9ad8\u7075\u654f\u5ea6\uff0c\u7528\u4e8e\u98ce\u6d1e\u6d4b\u8bd5<\/strong><\/h2>\n\n\n\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769<\/a><\/p>\n\n\n\n<p><strong>\u4e16\u754c\u6700\u9ad8\u6027\u80fd\u53cc\u9891 AlScN \u538b\u7535 MEMS \u9ea6\u514b\u98ce\uff0c\u7528\u4e8e\u6c14\u52a8\u58f0\u5b66\u98ce\u6d1e\u6d4b\u8bd5<\/strong> <strong>\u7531 Silicon Austria Labs (SAL) \u4e0e\u632a\u5a01\u4e1c\u5357\u5927\u5b66\u8054\u5408\u7814\u53d1<\/strong> <strong>\u7b2c\u4e00\u4f5c\u8005\uff1a<\/strong>Dr. Yanfen Zhai<\/p>\n\n\n\n<p><strong>\u6781\u9650\u5236\u9020\u6311\u6218 \u2014\u2014 \u5b8c\u7f8e\u4ea4\u4ed8<\/strong><\/p>\n\n\n\n<p><strong>\u5b8c\u6574\u7684 4 \u82f1\u5bf8 SOI \u6676\u5706\uff0c\u590d\u6742\u7684 8 \u63a9\u819c\u9ad8\u7cbe\u5ea6\u5de5\u827a\uff0c\u5305\u62ec\u6df1\u80cc\u8154\u3001\u84b8\u6c7d\u6c22\u6c1f\u9178\u91ca\u653e\uff0c\u4ee5\u53ca\u5e94\u529b\u63a7\u5236\u7684 AlScN\/Mo \u591a\u5c42\u5806\u53e0<\/strong><\/p>\n\n\n\n<p><strong>\u5168\u7403\u9996\u6b3e 30% \u94aa\u63ba\u6742\u7684 AlScN (AlSc30%N) \u8584\u819c MEMS \u9ea6\u514b\u98ce<\/strong><\/p>\n\n\n\n<p><strong>\u53cc\u60ac\u81c2\u8bbe\u8ba1 (0.94 mm\u00b2 + 0.36 mm\u00b2)\uff0c\u5728\u5355\u82af\u7247\u4e0a\u8986\u76d6\u4e24\u4e2a\u9891\u7387\u5341\u500d\u533a\u95f4<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n<figure class=\"wp-block-video aligncenter\"><video height=\"720\" style=\"aspect-ratio: 1280 \/ 720;\" width=\"1280\" controls preload=\"auto\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/video-aeromic.mp4\"><\/video><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large is-resized\"><img decoding=\"async\" src=\"https:\/\/qfab.feats.at\/wp-content\/uploads\/2025\/11\/PIEZO-MICROPHONE-1024x576.jpg\" alt=\"\" class=\"wp-image-426\" style=\"width:1133px;height:auto\"\/><\/figure>\n\n\n\n<p><strong>Airbus BACCHUS\u822a\u7a7a\u58f0\u5b66\u98ce\u6d1e\u5b9e\u6d4b\u5bf9\u6bd4<\/strong> \u2014\u2014 <\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>\u9879\u76ee<\/th><th>\u672c\u9879\u76eeAlSc30%N \u53cc\u9891\u6bb5MEMS\u9ea6\u514b\u98ce<\/th><th>\u4f20\u7edf\u9ad8\u7aef\u98ce\u6d1e\u7528\u538b\u7535MEMS\u9ea6\u514b\u98ce\uff082020-2024\u6700\u5e38\u7528\u578b\u53f7\uff09<\/th><th>\u4f20\u7edf\u98ce\u6d1e\u4e3b\u529b\u2014\u2014B&amp;K 1\/4\u82f1\u5bf8\u81ea\u7531\u573a\u7535\u5bb9\u9ea6\u514b\u98ce\uff084189\/4944\uff09<\/th><\/tr><\/thead><tbody><tr><td>\u7075\u654f\u5ea6<\/td><td><strong>3.2 mV\/Pa<\/strong><\/td><td>30\uff5e70 \u00b5V\/Pa\uff08\u6700\u9ad8\u4e5f\u4e0d\u8fc70.2 mV\/Pa\uff09<\/td><td>50 mV\/Pa\uff08\u9700200 V\u504f\u7f6e+\u524d\u7f6e\u653e\u5927\u5668\uff09<\/td><\/tr><tr><td>\u7075\u654f\u5ea6\u63d0\u5347\u500d\u6570<\/td><td><strong>45\uff5e100\u500d<\/strong><\/td><td>\u57fa\u51c6<\/td><td>\u4ec5\u9ad816\u500d\uff0c\u4f46\u4f53\u79ef\/\u6210\u672c\/\u5b89\u88c5\u96be\u5ea6\u8fdc\u9ad8\u4e8eMEMS<\/td><\/tr><tr><td>\u9891\u7387\u54cd\u5e94\uff08-1 dB\uff09<\/td><td><strong>300 Hz \u2013 &gt;55 kHz<\/strong>\uff08\u771f\u5b9e\u5e73\u5766\uff09<\/td><td>\u5178\u578b100 Hz \u2013 10\uff5e20 kHz<\/td><td>10 Hz \u2013 20 kHz\uff08\u9ad8\u9891\u523040 kHz\u5df2\u8870\u51cf\u4e25\u91cd\uff09<\/td><\/tr><tr><td>\u9ad8\u9891\u6781\u9650\uff08\u5b9e\u9645\u53ef\u5206\u8fa8\uff09<\/td><td><strong>55 kHz+<\/strong>\uff08\u8f6e\u8154\u5171\u632f\u3001\u7ec6\u5c0f\u6da1\u566a\u58f0\u6e05\u6670\u53ef\u89c1\uff09<\/td><td>\u6700\u9ad815 kHz\u5de6\u53f3\u5c31\u5df2\u6df9\u6ca1\u5728\u566a\u58f0\u4e2d<\/td><td>\u5b9e\u9645\u5f88\u96be\u8d85\u8fc725 kHz<\/td><\/tr><tr><td>\u52a8\u6001\u8303\u56f4<\/td><td><strong>&gt;147.7 dB SPL<\/strong>\uff08\u65e0\u504f\u7f6e\uff09<\/td><td>120\uff5e135 dB<\/td><td>148 dB\uff08\u4f46\u9700200 V\u504f\u7f6e+\u6602\u8d35\u524d\u653e\uff09<\/td><\/tr><tr><td>\u6700\u9ad8\u53ef\u6d4b\u58f0\u538b\u7ea7\uff08\u4e0d\u524a\u6ce2\uff09<\/td><td><strong>165 dB SPL\u4ee5\u4e0a<\/strong>\uff0870 m\/s\u6c14\u6d41\u4e0b\u5b9e\u6d4b145 dB\u4ecd\u7ebf\u6027\uff09<\/td><td>\u6700\u591a142\uff5e145 dB\u5c31\u9971\u548c<\/td><td>151 dB\uff08\u6781\u9650\uff09<\/td><\/tr><tr><td>\u662f\u5426\u9700\u8981\u76f4\u6d41\u504f\u7f6e<\/td><td><strong>\u4e0d\u9700\u8981<\/strong><\/td><td>\u4e0d\u9700\u8981<\/td><td><strong>\u5fc5\u987b200 V\u9ad8\u538b\u504f\u7f6e<\/strong><\/td><\/tr><tr><td>\u6297\u6c14\u6d41\u51b2\u51fb\u80fd\u529b<\/td><td><strong>70 m\/s\u76f4\u63a5\u8868\u9762\u5b89\u88c5\uff0c\u96f6\u635f\u574f<\/strong><\/td><td>\u5927\u591a\u6570&gt;40 m\/s\u5fc5\u987b\u52a0\u9f3b\u9525\u6216\u6c89\u5b54\u5b89\u88c5<\/td><td>\u5fc5\u987b\u52a0\u7d0a\u6d41\u7f51+\u9f3b\u9525\uff0c\u5426\u5219\u7acb\u5373\u635f\u574f<\/td><\/tr><tr><td>\u5b89\u88c5\u65b9\u5f0f<\/td><td><strong>\u5b8c\u5168\u8868\u9762\u9f50\u5e73\uff0c\u65e0\u4efb\u4f55\u51f8\u8d77<\/strong><\/td><td>\u90e8\u5206\u9700\u6c89\u5b54\u6216\u52a0\u5c0f\u578b\u9f3b\u9525<\/td><td>\u5fc5\u987b\u4e13\u4e1a\u6574\u6d41\u7f69+\u6c89\u5b54\u5b89\u88c5\uff0c\u7834\u574f\u6a21\u578b\u6c14\u52a8\u5916\u5f62<\/td><\/tr><tr><td>\u76f8\u4f4d\u4e00\u81f4\u6027\uff081\u201320 kHz\uff09<\/td><td><strong>&lt; \u00b12\u00b0<\/strong><\/td><td>\u00b15\u00b0\uff5e10\u00b0<\/td><td>&lt; \u00b13\u00b0\uff08\u4f46\u4f53\u79ef\u592a\u5927\uff0c\u65e0\u6cd5\u5bc6\u96c6\u9635\u5217\uff09<\/td><\/tr><tr><td>\u9635\u5217\u53ef\u5e03\u7f6e\u5bc6\u5ea6<\/td><td><strong>\u95f4\u8ddd\u4f4e\u81f35 mm<\/strong>\uff08\u9ad8\u9891\u58f0\u6e90\u5b9a\u4f4d\u7cbe\u5ea6&lt;3 mm\uff09<\/td><td>\u4e00\u822c15\u201330 mm<\/td><td>\u6700\u5c0f\u95f4\u8ddd\u7ea640 mm\uff08\u53d7\u4f53\u79ef\u9650\u5236\uff09<\/td><\/tr><tr><td>\u5355\u4e2a\u9ea6\u514b\u98ce\u6210\u672c<\/td><td><strong>\u8fdc\u4f4e\u4e8e100\u6b27\u5143\uff08\u91cf\u4ea7\u540e&lt;30\u6b27\u5143\uff09<\/strong><\/td><td>200\uff5e600\u6b27\u5143<\/td><td><strong>&gt;4000\u6b27\u5143\/\u652f<\/strong><\/td><\/tr><tr><td>\u5728Airbus BACCHUS\u98ce\u6d1e\u7684\u8bc4\u4ef7<\/td><td>\u201cBest ever tested\u201d<\/td><td>\u201c\u52c9\u5f3a\u53ef\u7528\uff0c\u9ad8\u9891\u5b8c\u5168\u4e22\u5931\u201d<\/td><td>\u201c\u91d1\u6807\u51c6\uff0c\u4f46\u5b89\u88c5\u592a\u9ebb\u70e6\u3001\u6210\u672c\u592a\u9ad8\u3001\u65e0\u6cd5\u9ad8\u9891\u9635\u5217\u201d<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p><strong>\u4e00\u53e5\u8bdd\u603b\u7ed3<\/strong> \u5728Airbus\u6700\u4e25\u82db\u7684BACCHUS\u822a\u7a7a\u58f0\u5b66\u98ce\u6d1e\u91cc\uff0c \u4f20\u7edf\u538b\u7535MEMS\u53ea\u80fd\u770b\u5230\u201c\u566a\u58f0\u7684\u51b0\u5c71\u4e00\u89d2\u201d\uff08&lt;20 kHz\uff09\uff0c B&amp;K\u7535\u5bb9\u9ea6\u514b\u98ce\u867d\u7136\u7075\u654f\u4f46\u201c\u53c8\u5927\u53c8\u8d35\u53c8\u5a07\u8d35\u201d\uff0c \u800c\u6211\u4eec\u7684AlSc30%N\u53cc\u9891\u6bb5\u9ea6\u514b\u98ce\u662f<strong>\u7b2c\u4e00\u4e2a\u771f\u6b63\u505a\u5230\u201c\u53c8\u5c0f\u3001\u53c8\u7075\u654f\u3001\u53c8\u6297\u6253\u3001\u53c8\u80fd\u542c\u523055 kHz\u4ee5\u4e0a\u5168\u90e8\u7ec6\u8282\u201d\u7684\u4f20\u611f\u5668<\/strong>\u2014\u2014<\/p>\n\n\n\n<p>\u8fd9\u5c31\u662f\u4e3a\u4ec0\u4e48\u5b83\u4e0d\u518d\u662f\u201c\u53ef\u7528\u7684\u66ff\u4ee3\u65b9\u6848\u201d\uff0c\u800c\u662f<strong>\u76f4\u63a5\u53d6\u4ee3\u4f20\u7edf\u65b9\u6848\u6210\u4e3a\u65b0\u4e00\u4ee3\u822a\u7a7a\u98ce\u6d1e\u6d4b\u91cf\u6807\u914d<\/strong>\u7684\u5b9e\u529b\u3002<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1080\" height=\"331\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/output.gif\" alt=\"\" class=\"wp-image-108\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1080\" height=\"331\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/output_2.gif\" alt=\"\" class=\"wp-image-115\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1080\" height=\"331\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/output_04_180kHz.gif\" alt=\"\" class=\"wp-image-117\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1080\" height=\"331\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/output_04_260kHz.gif\" alt=\"\" class=\"wp-image-118\"\/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"1080\" height=\"382\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/output_firstresonantmode.gif\" alt=\"\" class=\"wp-image-119\"\/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>\u9879\u76ee -&gt; \u538b\u7535\u9ea6\u514b\u98ce\u9635\u5217 \u5df2\u5728\u7a7a\u5ba2 BACCHUS \u6c14\u52a8\u58f0\u5b66\u8bd5\u9a8c\u53f0\u4e0a\u6210\u529f\u9a8c\u8bc1 \u7b2c\u4e00\u4ee3 (SAL)\uff1aAlSc30%N \u6280\u672f (20\u201355 kHz)\uff0c\u7531 Silicon Austria Labs \u5f00\u53d1 \u7b2c\u4e8c\u4ee3 (25FAB)\uff1a\u9ad8\u6027\u80fd AlSc40%N \u6280\u672f\uff0c\u5e94\u7528\u4e8e 8\/12 \u82f1\u5bf8\u6676\u5706 (10\u2013100 kHz) \u53cc\u9891\u94dd\u94aa\u6c2e\u5316\u7269\u538b\u7535\u9ea6\u514b\u98ce\uff0c\u5177\u6709\u5bbd\u5e26\u5bbd\u3001\u5927\u52a8\u6001\u8303\u56f4\u548c\u9ad8\u7075\u654f\u5ea6\uff0c\u7528\u4e8e\u98ce\u6d1e\u6d4b\u8bd5 https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769 \u4e16\u754c\u6700\u9ad8\u6027\u80fd\u53cc\u9891 AlScN \u538b\u7535 MEMS \u9ea6\u514b\u98ce\uff0c\u7528\u4e8e\u6c14\u52a8\u58f0\u5b66\u98ce\u6d1e\u6d4b\u8bd5 \u7531 Silicon Austria Labs (SAL) \u4e0e\u632a\u5a01\u4e1c\u5357\u5927\u5b66\u8054\u5408\u7814\u53d1 \u7b2c\u4e00\u4f5c\u8005\uff1aDr. Yanfen Zhai \u6781\u9650\u5236\u9020\u6311\u6218 \u2014\u2014 \u5b8c\u7f8e\u4ea4\u4ed8 \u5b8c\u6574\u7684 4 \u82f1\u5bf8 SOI \u6676\u5706\uff0c\u590d\u6742\u7684 8 \u63a9\u819c\u9ad8\u7cbe\u5ea6\u5de5\u827a\uff0c\u5305\u62ec\u6df1\u80cc\u8154\u3001\u84b8\u6c7d\u6c22\u6c1f\u9178\u91ca\u653e\uff0c\u4ee5\u53ca\u5e94\u529b\u63a7\u5236\u7684 AlScN\/Mo \u591a\u5c42\u5806\u53e0 \u5168\u7403\u9996\u6b3e 30% \u94aa\u63ba\u6742\u7684 AlScN [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page-home-cn","meta":{"footnotes":""},"class_list":["post-720","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/720","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/comments?post=720"}],"version-history":[{"count":30,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/720\/revisions"}],"predecessor-version":[{"id":1483,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/720\/revisions\/1483"}],"wp:attachment":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/media?parent=720"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}