{"id":687,"date":"2025-12-03T17:17:11","date_gmt":"2025-12-03T17:17:11","guid":{"rendered":"https:\/\/25fab.ch\/?page_id=687"},"modified":"2026-02-02T20:13:44","modified_gmt":"2026-02-02T20:13:44","slug":"piezo-microphone-array-en","status":"publish","type":"page","link":"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-en\/","title":{"rendered":"piezo-microphone-array-en"},"content":{"rendered":"\n<p class=\"is-style-default has-fira-code-font-family\">projects -&gt; piezo microphone array<\/p>\n\n\n\n<div class=\"wp-block-group is-nowrap is-layout-flex wp-container-core-group-is-layout-6c531013 wp-block-group-is-layout-flex\">\n<div class=\"wp-block-group has-global-padding is-layout-constrained wp-block-group-is-layout-constrained\">\n<figure class=\"wp-block-gallery has-nested-images columns-default is-cropped wp-block-gallery-1 is-layout-flex wp-block-gallery-is-layout-flex\">\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-en\/\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"597\" data-id=\"218\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg\" alt=\"\" class=\"wp-image-218\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-300x175.jpeg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-768x448.jpeg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk.jpeg 1280w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-de\/\"><img loading=\"lazy\" decoding=\"async\" width=\"189\" height=\"113\" data-id=\"213\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_swiss.png\" alt=\"\" class=\"wp-image-213\" style=\"width:40px\"\/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-cn\/\"><img loading=\"lazy\" decoding=\"async\" width=\"960\" height=\"640\" data-id=\"707\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg\" alt=\"\" class=\"wp-image-707\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg 960w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-300x200.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-768x512.jpg 768w\" sizes=\"auto, (max-width: 960px) 100vw, 960px\" \/><\/a><\/figure>\n<\/figure>\n<\/div>\n<\/div>\n\n\n\n<p>Successfully validated on Airbus BACCHUS aeroacoustic test bench<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<div class=\"wp-block-columns alignwide is-layout-flex wp-container-core-columns-is-layout-9196cdce wp-block-columns-is-layout-flex\" style=\"padding-top:0\">\n<div class=\"wp-block-column is-vertically-aligned-top has-base-background-color has-background is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image aligncenter size-large\" style=\"margin-bottom:0\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"561\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png\" alt=\"\" class=\"wp-image-282\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-300x164.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-768x421.png 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE.png 1031w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"586\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-1024x586.png\" alt=\"\" class=\"wp-image-125\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-1024x586.png 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-300x172.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-768x440.png 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic.png 1462w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"576\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg\" alt=\"\" class=\"wp-image-428\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-300x169.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-768x432.jpg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1.jpg 1067w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-container-core-column-is-layout-119bc444 wp-block-column-is-layout-flow\">\n<p class=\"has-large-font-size\">Gen 1 (SAL): AlSc30%N technology (20\u201355 kHz) developed at Silicon Austria Labs<\/p>\n\n\n\n<p class=\"has-large-font-size\">Gen 2 (25FAB): High-performance AlSc40%N on 8\/12-inch wafers (10\u2013100 kHz)<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Dual-frequency Aluminum Scandium Nitride piezoelectric microphones with wide bandwidth, large dynamic range, and high sensitivity for wind tunnel testing<\/h2>\n\n\n\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769<\/a><\/p>\n\n\n\n<p><strong>World\u2019s Highest-Performance Dual-Frequency AlScN Piezoelectric MEMS Microphone for Aeroacoustic Wind-Tunnel Testing<\/strong> Silicon Austria Labs (SAL) + University of South-Eastern Norway First author: Dr. Yanfen Zhai<\/p>\n\n\n\n<p><strong>Extreme Fabrication Challenge \u2013 Perfectly Delivered<\/strong><\/p>\n\n\n\n<p>Full 4-inch SOI wafer, complex 8-mask high-precision process including deep backside cavity, vapor HF release, and stress-controlled AlScN\/Mo multilayer stack<br><\/p>\n\n\n\n<p>First-ever 30 % scandium-doped AlScN (AlSc30%N) thin-film MEMS microphone<\/p>\n\n\n\n<p>Dual cantilever design (0.94 mm\u00b2 + 0.36 mm\u00b2) on single chip covering two frequency decades<\/p>\n<\/div>\n<\/div>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"847\" height=\"494\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png\" alt=\"\" class=\"wp-image-698\" style=\"width:931px;height:auto\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png 847w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-300x175.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-768x448.png 768w\" sizes=\"auto, (max-width: 847px) 100vw, 847px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-video\"><video height=\"720\" style=\"aspect-ratio: 1280 \/ 720;\" width=\"1280\" controls preload=\"auto\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/video-aeromic.mp4\"><\/video><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><img decoding=\"async\" src=\"https:\/\/qfab.feats.at\/wp-content\/uploads\/2025\/11\/PIEZO-MICROPHONE-1024x576.jpg\" alt=\"\" class=\"wp-image-426\" style=\"width:1133px;height:auto\"\/><\/figure>\n\n\n\n<p>Dual-frequency AlSc30%N piezoelectric microphones with wide bandwidth, large dynamic range, and high sensitivity for wind tunnel testing<\/p>\n\n\n\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\" data-type=\"link\" data-id=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769<\/a><\/p>\n\n\n\n<p><strong>World\u2019s Highest-Performance Dual-Frequency AlScN Piezoelectric MEMS Microphone for Aeroacoustic Wind-Tunnel Testing<\/strong> Silicon Austria Labs (SAL) + University of South-Eastern Norway <\/p>\n\n\n\n<p>Author: Dr. Yanfen Zhai Prof. Lixiang Wu<\/p>\n\n\n\n<p><strong>Extreme Fabrication Challenge \u2013 Perfectly Delivered<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>First-ever 30 % scandium-doped AlScN (AlSc30%N) thin-film MEMS microphone<\/li>\n\n\n\n<li>Dual cantilever design (0.94 mm\u00b2 + 0.36 mm\u00b2) on single chip covering two frequency decades<\/li>\n\n\n\n<li>Full 4-inch SOI wafer, complex 8-mask high-precision process including deep backside cavity, vapor HF release, and stress-controlled AlScN\/Mo multilayer stack<\/li>\n<\/ul>\n\n\n\n<p><strong>Result \u2013 First Wafer, Zero Failure<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Turnaround time: only <strong>3 weeks<\/strong> from layout to fully packaged working devices<\/li>\n\n\n\n<li><strong>100 % yield<\/strong> across the entire wafer<\/li>\n\n\n\n<li>Sensitivity: <strong>3.2 mV\/Pa<\/strong> (100\u00d7 higher than previous AlN state-of-the-art)<\/li>\n\n\n\n<li>Bandwidth: 300 Hz \u2013 <strong>&gt; 55 kHz<\/strong> (flat response)<\/li>\n\n\n\n<li>Dynamic range: <strong>&gt; 147.7 dB SPL<\/strong> (no DC bias required)<\/li>\n\n\n\n<li>SNR: 60.2 dB<\/li>\n\n\n\n<li>Successfully validated on Airbus BACCHUS aeroacoustic test bench<\/li>\n<\/ul>\n\n\n\n<p>Currently the highest sensitivity and widest bandwidth piezoelectric MEMS microphone ever reported for professional wind-tunnel applications.<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><strong>Metric<\/strong><\/td><td><strong>Target specification<\/strong><\/td><td colspan=\"2\"><strong>State of the art<\/strong><\/td><\/tr><tr><td>Sensing element size<\/td><td>600 \u00b5m\u00d71000 \u00b5m (900 um\u00d71450 um)<\/td><td>828 \u00b5m diameter<\/td><td>0.96 mm<sup>2<\/sup><\/td><\/tr><tr><td>Bandwidth<\/td><td>100 Hz \u2013 100 kHz (&gt;50 kHz)<\/td><td>69 Hz \u2013 20 kHz<\/td><td>100 Hz \u2013 10 kHz<\/td><\/tr><tr><td>Sensitivity<\/td><td>5-10 mV\/Pa (5.35mV\/pa)<\/td><td>32-44 \u00b5V\/Pa<\/td><td>7.9 mV\/Pa<\/td><\/tr><tr><td>Dynamic range<\/td><td>30-170 dB SPL (&gt;150 dB SPL)<\/td><td>40-172 dB SPL<\/td><td>127 dB AOP<\/td><\/tr><tr><td>Signal-to-Noise Ratio<\/td><td>64 dB (ref. 94 dB SPL)* (65 dB)<\/td><td>N\/A<\/td><td>66-68 dB<\/td><\/tr><tr><td>Application<\/td><td>Aeroacoustic measurement<\/td><td>Aeroacoustic measurement<\/td><td>Consumer electronics<\/td><\/tr><tr><td>MEMS structure<\/td><td>Two couples of similar triangle cantilevers<\/td><td>Circular membrane<\/td><td>Uniformly sectored cantilevers<\/td><\/tr><tr><td>Piezoeelectric material<\/td><td>Multilayer AlScN<\/td><td>Bilayer AlN<\/td><td>Bilayer AlN<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>projects -&gt; piezo microphone array Successfully validated on Airbus BACCHUS aeroacoustic test bench Gen 1 (SAL): AlSc30%N technology (20\u201355 kHz) developed at Silicon Austria Labs Gen 2 (25FAB): High-performance AlSc40%N on 8\/12-inch wafers (10\u2013100 kHz) Dual-frequency Aluminum Scandium Nitride piezoelectric microphones with wide bandwidth, large dynamic range, and high sensitivity for wind tunnel testing https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page_home_en","meta":{"footnotes":""},"class_list":["post-687","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/687","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/comments?post=687"}],"version-history":[{"count":21,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/687\/revisions"}],"predecessor-version":[{"id":1480,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/687\/revisions\/1480"}],"wp:attachment":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/media?parent=687"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}