{"id":1084,"date":"2025-12-05T17:02:06","date_gmt":"2025-12-05T17:02:06","guid":{"rendered":"https:\/\/25fab.ch\/?page_id=1084"},"modified":"2026-02-02T20:14:21","modified_gmt":"2026-02-02T20:14:21","slug":"piezo-microphone-array-de","status":"publish","type":"page","link":"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-de\/","title":{"rendered":"piezo-microphone-array-de"},"content":{"rendered":"\n<p class=\"is-style-default has-fira-code-font-family\">Projekte -&gt; Piezo Microphone Array<\/p>\n\n\n\n<div class=\"wp-block-group is-nowrap is-layout-flex wp-container-core-group-is-layout-6c531013 wp-block-group-is-layout-flex\">\n<div class=\"wp-block-group has-global-padding is-layout-constrained wp-block-group-is-layout-constrained\">\n<figure class=\"wp-block-gallery has-nested-images columns-default is-cropped wp-block-gallery-1 is-layout-flex wp-block-gallery-is-layout-flex\">\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-en\/\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"597\" data-id=\"218\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg\" alt=\"\" class=\"wp-image-218\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-1024x597.jpeg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-300x175.jpeg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk-768x448.jpeg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_uk.jpeg 1280w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-de\/\"><img loading=\"lazy\" decoding=\"async\" width=\"189\" height=\"113\" data-id=\"213\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/flag_swiss.png\" alt=\"\" class=\"wp-image-213\" style=\"width:40px\"\/><\/a><\/figure>\n\n\n\n<figure class=\"wp-block-image size-large is-resized\"><a href=\"https:\/\/25fab.ch\/index.php\/piezo-microphone-array-cn\/\"><img loading=\"lazy\" decoding=\"async\" width=\"960\" height=\"640\" data-id=\"707\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg\" alt=\"\" class=\"wp-image-707\" style=\"width:40px\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china.jpg 960w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-300x200.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/china-768x512.jpg 768w\" sizes=\"auto, (max-width: 960px) 100vw, 960px\" \/><\/a><\/figure>\n<\/figure>\n<\/div>\n<\/div>\n\n\n\n<p><strong>Erfolgreich validiert auf dem Airbus\u2011BACCHUS\u2011aeroakustischen Pr\u00fcfstand<\/strong><\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<div class=\"wp-block-columns alignwide is-layout-flex wp-container-core-columns-is-layout-9196cdce wp-block-columns-is-layout-flex\" style=\"padding-top:0\">\n<div class=\"wp-block-column has-base-background-color has-background is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image aligncenter size-large\" style=\"margin-bottom:0\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"561\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png\" alt=\"\" class=\"wp-image-282\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-1024x561.png 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-300x164.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE-768x421.png 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/MICPHONE.png 1031w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"586\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-1024x586.png\" alt=\"\" class=\"wp-image-125\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-1024x586.png 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-300x172.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic-768x440.png 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/aerocoustic.png 1462w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"576\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg\" alt=\"\" class=\"wp-image-428\" style=\"object-fit:cover\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-1024x576.jpg 1024w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-300x169.jpg 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1-768x432.jpg 768w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/11\/micphone-1.jpg 1067w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-vertically-aligned-top is-layout-flow wp-container-core-column-is-layout-119bc444 wp-block-column-is-layout-flow\">\n<p class=\"has-large-font-size\"><strong>Generation 1 (SAL): AlSc30%N\u2011Technologie (20\u201355 kHz), entwickelt bei Silicon Austria Labs<\/strong><\/p>\n\n\n\n<p class=\"has-large-font-size\"><strong>Generation 2 (25FAB): Hochleistungs\u2011AlSc40%N auf 8\/12\u2011Zoll\u2011Wafern (10\u2013100 kHz)<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\"><strong>Doppelfrequenz\u2011Aluminium\u2011Scandium\u2011Nitrid\u2011Piezoelektrik\u2011Mikrofone mit breiter Bandbreite, gro\u00dfem Dynamikbereich und hoher Empfindlichkeit f\u00fcr Windkanaltests<\/strong><\/h2>\n\n\n\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769<\/a><\/p>\n\n\n\n<p><strong>Weltweit leistungsst\u00e4rkstes doppelfrequentes AlScN\u2011Piezoelektrik\u2011MEMS\u2011Mikrofon f\u00fcr aeroakustische Windkanaltests<\/strong> <strong>Silicon Austria Labs (SAL) + Universit\u00e4t S\u00fcdost\u2011Norwegen<\/strong> <strong>Erstautor: Dr. Yanfen Zhai<\/strong><\/p>\n\n\n\n<p><strong><strong>Extreme Fertigungsherausforderung \u2013 Perfekt umgesetzt<\/strong><\/strong><\/p>\n\n\n\n<p><strong>Vollst\u00e4ndiger 4\u2011Zoll\u2011SOI\u2011Wafer, komplexer Hochpr\u00e4zisionsprozess mit 8 Masken, einschlie\u00dflich tiefem R\u00fcckseitenhohlraum, Dampf\u2011HF\u2011Freisetzung sowie spannungskontrolliertem AlScN\/Mo\u2011Mehrschichtstapel<\/strong><br><\/p>\n\n\n\n<p><strong>Erstes jemals entwickeltes 30\u202f%\u2011Scandium\u2011dotiertes AlScN (AlSc30%N) D\u00fcnnschicht\u2011MEMS\u2011Mikrofon<\/strong><\/p>\n\n\n\n<p><strong>Doppel\u2011Kragarm\u2011Design (0,94 mm\u00b2 + 0,36 mm\u00b2) auf einem einzelnen Chip, das zwei Frequenzdekaden abdeckt<\/strong><\/p>\n<\/div>\n<\/div>\n\n\n\n<figure class=\"wp-block-image size-full is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"847\" height=\"494\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png\" alt=\"\" class=\"wp-image-698\" style=\"width:931px;height:auto\" srcset=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image.png 847w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-300x175.png 300w, https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/image-768x448.png 768w\" sizes=\"auto, (max-width: 847px) 100vw, 847px\" \/><\/figure>\n\n\n\n<figure class=\"wp-block-video\"><video height=\"720\" style=\"aspect-ratio: 1280 \/ 720;\" width=\"1280\" controls preload=\"auto\" src=\"https:\/\/25fab.ch\/wp-content\/uploads\/2025\/12\/video-aeromic.mp4\"><\/video><\/figure>\n\n\n\n<p><strong>Doppelfrequenz\u2011AlSc30%N\u2011Piezoelektrik\u2011Mikrofone mit breiter Bandbreite, gro\u00dfem Dynamikbereich und hoher Empfindlichkeit f\u00fcr Windkanaltests<\/strong><\/p>\n\n\n\n<p><a href=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\" data-type=\"link\" data-id=\"https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769\">https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769<\/a><\/p>\n\n\n\n<p><strong>Weltweit leistungsst\u00e4rkstes doppelfrequentes AlScN\u2011Piezoelektrik\u2011MEMS\u2011Mikrofon f\u00fcr aeroakustische Windkanaltests<\/strong> <strong>Silicon Austria Labs (SAL) + Universit\u00e4t S\u00fcdost\u2011Norwegen<\/strong><\/p>\n\n\n\n<p><strong>Autoren: Dr. Yanfen Zhai, Prof. Lixiang Wu<\/strong><\/p>\n\n\n\n<p><strong><strong>Extreme Fertigungsherausforderung \u2013 Perfekt geliefert<\/strong><\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Erstes jemals entwickeltes 30\u202f%\u2011Scandium\u2011dotiertes AlScN (AlSc30%N) D\u00fcnnschicht\u2011MEMS\u2011Mikrofon<\/strong><\/li>\n\n\n\n<li><strong>Doppel\u2011Kragarm\u2011Design (0,94 mm\u00b2 + 0,36 mm\u00b2) auf einem einzelnen Chip, das zwei Frequenzdekaden abdeckt<\/strong><\/li>\n\n\n\n<li><strong>Vollst\u00e4ndiger 4\u2011Zoll\u2011SOI\u2011Wafer, komplexer Hochpr\u00e4zisionsprozess mit 8 Masken, einschlie\u00dflich tiefem R\u00fcckseitenhohlraum, Dampf\u2011HF\u2011Freisetzung sowie spannungskontrolliertem AlScN\/Mo\u2011Mehrschichtstapel<\/strong><\/li>\n<\/ul>\n\n\n\n<p><strong><strong>Ergebnis \u2013 Erster Wafer, null Ausf\u00e4lle<\/strong><\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Durchlaufzeit:<\/strong> nur 3 Wochen vom Layout bis zu vollst\u00e4ndig verpackten, funktionsf\u00e4higen Bauteilen<\/li>\n\n\n\n<li><strong>Ausbeute:<\/strong> 100\u202f% \u00fcber den gesamten Wafer<\/li>\n\n\n\n<li><strong>Empfindlichkeit:<\/strong> 3,2\u202fmV\/Pa (100\u00d7 h\u00f6her als bisheriger AlN\u2011Stand der Technik)<\/li>\n\n\n\n<li><strong>Bandbreite:<\/strong> 300\u202fHz \u2013 &gt;\u202f55\u202fkHz (flache Antwort)<\/li>\n\n\n\n<li><strong>Dynamikbereich:<\/strong> &gt;\u202f147,7\u202fdB SPL (kein DC\u2011Bias erforderlich)<\/li>\n\n\n\n<li><strong>Signal\u2011Rausch\u2011Verh\u00e4ltnis (SNR):<\/strong> 60,2\u202fdB<\/li>\n\n\n\n<li><strong>Validierung:<\/strong> erfolgreich getestet auf dem Airbus\u2011BACCHUS\u2011aeroakustischen Pr\u00fcfstand<\/li>\n<\/ul>\n\n\n\n<p><strong>Derzeit das empfindlichste und breitbandigste piezoelektrische MEMS\u2011Mikrofon, das jemals f\u00fcr professionelle Windkanalanwendungen berichtet wurde.<\/strong><\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td><strong>Metric<\/strong><\/td><td><strong>Target specification<\/strong><\/td><td colspan=\"2\"><strong>State of the art<\/strong><\/td><\/tr><tr><td>Sensing element size<\/td><td>600 \u00b5m\u00d71000 \u00b5m (900 um\u00d71450 um)<\/td><td>828 \u00b5m diameter<\/td><td>0.96 mm<sup>2<\/sup><\/td><\/tr><tr><td>Bandwidth<\/td><td>100 Hz \u2013 100 kHz (&gt;50 kHz)<\/td><td>69 Hz \u2013 20 kHz<\/td><td>100 Hz \u2013 10 kHz<\/td><\/tr><tr><td>Sensitivity<\/td><td>5-10 mV\/Pa (5.35mV\/pa)<\/td><td>32-44 \u00b5V\/Pa<\/td><td>7.9 mV\/Pa<\/td><\/tr><tr><td>Dynamic range<\/td><td>30-170 dB SPL (&gt;150 dB SPL)<\/td><td>40-172 dB SPL<\/td><td>127 dB AOP<\/td><\/tr><tr><td>Signal-to-Noise Ratio<\/td><td>64 dB (ref. 94 dB SPL)* (65 dB)<\/td><td>N\/A<\/td><td>66-68 dB<\/td><\/tr><tr><td>Application<\/td><td>Aeroacoustic measurement<\/td><td>Aeroacoustic measurement<\/td><td>Consumer electronics<\/td><\/tr><tr><td>MEMS structure<\/td><td>Two couples of similar triangle cantilevers<\/td><td>Circular membrane<\/td><td>Uniformly sectored cantilevers<\/td><\/tr><tr><td>Piezoeelectric material<\/td><td>Multilayer AlScN<\/td><td>Bilayer AlN<\/td><td>Bilayer AlN<\/td><\/tr><\/tbody><\/table><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>Projekte -&gt; Piezo Microphone Array Erfolgreich validiert auf dem Airbus\u2011BACCHUS\u2011aeroakustischen Pr\u00fcfstand Generation 1 (SAL): AlSc30%N\u2011Technologie (20\u201355 kHz), entwickelt bei Silicon Austria Labs Generation 2 (25FAB): Hochleistungs\u2011AlSc40%N auf 8\/12\u2011Zoll\u2011Wafern (10\u2013100 kHz) Doppelfrequenz\u2011Aluminium\u2011Scandium\u2011Nitrid\u2011Piezoelektrik\u2011Mikrofone mit breiter Bandbreite, gro\u00dfem Dynamikbereich und hoher Empfindlichkeit f\u00fcr Windkanaltests https:\/\/ieeexplore.ieee.org\/abstract\/document\/10516769 Weltweit leistungsst\u00e4rkstes doppelfrequentes AlScN\u2011Piezoelektrik\u2011MEMS\u2011Mikrofon f\u00fcr aeroakustische Windkanaltests Silicon Austria Labs (SAL) + Universit\u00e4t [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"page_home_de","meta":{"footnotes":""},"class_list":["post-1084","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/1084","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/comments?post=1084"}],"version-history":[{"count":10,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/1084\/revisions"}],"predecessor-version":[{"id":1481,"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/pages\/1084\/revisions\/1481"}],"wp:attachment":[{"href":"https:\/\/25fab.ch\/index.php\/wp-json\/wp\/v2\/media?parent=1084"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}